Nano Research

, Volume 8, Issue 9, pp 2842–2849

High-quality-factor tantalum oxide nanomechanical resonators by laser oxidation of TaSe2

  • Santiago J. Cartamil-Bueno
  • Peter G. Steeneken
  • Frans D. Tichelaar
  • Efren Navarro-Moratalla
  • Warner J. Venstra
  • Ronald van Leeuwen
  • Eugenio Coronado
  • Herre S. J. van der Zant
  • Gary A. Steele
  • Andres Castellanos-Gomez
Research Article

Abstract

Controlling the strain in two-dimensional (2D) materials is an interesting avenue to tailor the mechanical properties of nanoelectromechanical systems. Here, we demonstrate a technique to fabricate ultrathin tantalum oxide nanomechanical resonators with large stress by the laser oxidation of nano-drumhead resonators composed of tantalum diselenide (TaSe2), a layered 2D material belonging to the metal dichalcogenides. Before the study of their mechanical properties with a laser interferometer, we verified the oxidation and crystallinity of the freely suspended tantalum oxide using high-resolution electron microscopy. We demonstrate that the stress of tantalum oxide resonators increases by 140 MPa (with respect to pristine TaSe2 resonators), which causes an enhancement in the quality factor (14 times larger) and resonance frequency (9 times larger) of these resonators.

Keywords

TaSe2 tantalum oxide mechanical resonators laser oxidation optical interferometer high quality factor 

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Copyright information

© Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2015

Authors and Affiliations

  • Santiago J. Cartamil-Bueno
    • 1
  • Peter G. Steeneken
    • 1
  • Frans D. Tichelaar
    • 2
  • Efren Navarro-Moratalla
    • 3
  • Warner J. Venstra
    • 1
  • Ronald van Leeuwen
    • 1
  • Eugenio Coronado
    • 3
  • Herre S. J. van der Zant
    • 1
  • Gary A. Steele
    • 1
  • Andres Castellanos-Gomez
    • 1
  1. 1.Kavli Institute of NanoscienceDelft University of TechnologyDelftThe Netherlands
  2. 2.Kavli Institute of NanoscienceDelft University of Technology, National Centre for HREMDelftThe Netherlands
  3. 3.Instituto Ciencia Molecular (ICMol)Univ. ValenciaPaternaSpain
  4. 4.Instituto Madrileño de Estudios Avanzados en Nanociencia (IMDEA-Nanociencia)MadridSpain

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