Nano Research

, Volume 5, Issue 3, pp 190–198 | Cite as

Vertical oxide nanotubes connected by subsurface microchannels

  • Henrik PerssonEmail author
  • Jason P. Beech
  • Lars Samuelson
  • Stina Oredsson
  • Christelle N. Prinz
  • Jonas O. TegenfeldtEmail author
Research Article


We describe the fabrication of arrays of oxide nanotubes using a combination of bottom up and top down nanofabrication. The nanotubes are made from epitaxially grown semiconductor nanowires that are covered with an oxide layer using atomic layer deposition. The tips of the oxide-covered nanowires are removed by argon sputtering and the exposed semiconductor core is then selectively etched, leaving a hollow oxide tube. We show that it is possible to create fluidic connections to the nanotubes by a combination of electron beam lithography to precisely define the nanotube positions and controlled wet under-etching. DNA transport is demonstrated in the microchannel. Cells were successfully cultured on the nanotube arrays, demonstrating compatibility with cell-biological applications. Our device opens up the possibility of injecting molecules into cells with both spatial and temporal control. Open image in new window


Nanotube cell injection nanowire gallium phosphide reactive ion etching wet etching cell 


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Supplementary material

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Copyright information

© Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012

Authors and Affiliations

  • Henrik Persson
    • 1
    Email author
  • Jason P. Beech
    • 1
  • Lars Samuelson
    • 1
  • Stina Oredsson
    • 2
  • Christelle N. Prinz
    • 1
    • 3
  • Jonas O. Tegenfeldt
    • 1
    • 4
    Email author
  1. 1.Solid State Physics/The Nanometer Structure ConsortiumLund UniversityLundSweden
  2. 2.Department of BiologyLund UniversityLundSweden
  3. 3.Neuronano Research CenterLund UniversityLundSweden
  4. 4.Department of PhysicsUniversity of GothenburgGothenburgSweden

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