Nano Research

, Volume 1, Issue 2, pp 158–165

Wafer scale synthesis of dense aligned arrays of single-walled carbon nanotubes

  • Weiwei Zhou
  • Christopher Rutherglen
  • Peter J. Burke
Open Access
Research Article
  • 792 Downloads

Abstract

Here we present an easy one-step approach to pattern uniform catalyst lines for the growth of dense, aligned parallel arrays of single-walled carbon nanotubes (SWNTs) on quartz wafers by using photolithography or polydimethylsiloxane (PDMS) stamp microcontact printing (µCP). By directly doping an FeCl3/methanol solution into Shipley 1827 photoresist or polyvinylpyrrolidone (PVP), various catalyst lines can be well-patterned on a wafer scale. In addition, during the chemical vapor deposition (CVD) growth of SWNTs the polymer layers play a very important role in the formation of mono-dispersed nanoparticles. This universal and efficient method for the patterning growth of SWNTs arrays on a surface is compatible with the microelectronics industry, thus enabling of the fabrication highly integrated circuits of SWNTs.

Keywords

Single-walled carbon nanotubes (SWNTs) chemical vapor deposition (CVD) photolithography microcontact printing (µCP) 

Copyright information

© Tsinghua Press and Springer-Verlag GmbH 2008

Authors and Affiliations

  • Weiwei Zhou
    • 1
  • Christopher Rutherglen
    • 1
  • Peter J. Burke
    • 1
  1. 1.Department of Electrical Engineering and Computer ScienceUniversity of CaliforniaIrvineUSA

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