Advertisement

Transactions of Tianjin University

, Volume 25, Issue 2, pp 195–200 | Cite as

Optical and Irradiation-Resistant Properties of ITO Films on F46 and PI Substrates

  • Chao Zhou
  • Hui Zhou
  • Yanchun He
  • Miao Yang
  • Yuqing Xiong
  • Lingmao XuEmail author
  • Yi Wang
Research Article
  • 110 Downloads

Abstract

This study investigated indium tin oxide (ITO) films that were deposited on fluororesin-46 (F46) and polyimide (PI) transparent flexible substrates by a DC magnetron sputtering system. The optical properties of ITO films on F46 and PI including transmittance and reflectance in visible, near-infrared, and infrared spectral regions were obtained, and the surface morphology, and optical and electrical properties of ITO/F46 and ITO/PI after vacuum ultraviolet irradiation were investigated. The results showed that the mean transmittances of ITO/F46 and ITO/PI decreased and the sheet resistance increased after the irradiation, and these effects were mainly attributed to the greater surface roughness and crystal defects caused by the irradiation.

Keywords

Indium tin oxide Transparent flexible substrates Optical properties Vacuum ultraviolet irradiation-resistant property 

Notes

Acknowledgements

This work was supported by the Science and Technology on Vacuum Technology and Physics Laboratory under the research Project No. 6142207040104.

References

  1. 1.
    Yang C, Lee S, Lin T et al (2008) Electrical and optical properties of indium tin oxide films prepared on plastic substrates by radio frequency magnetron sputtering. Thin Solid Films 516(8):1984–1991CrossRefGoogle Scholar
  2. 2.
    Wang LM, Chen YJ, Liao JW (2008) Characteristics of indium-tin oxide thin films grown on flexible plastic substrates at room temperature. J Phys Chem Solids 69(2–3):527–530CrossRefGoogle Scholar
  3. 3.
    Liu WS, Cheng HM, Hu HC et al (2015) Indium tin oxide with titanium doping for transparent conductive film application on CIGS solar cells. Appl Surf Sci 354(A):31–35CrossRefGoogle Scholar
  4. 4.
    Kim H, Osofsky M, Miller MM et al (2012) Room temperature ferromagnetism in transparent Fe-doped In2O3 films. Appl Phys Lett 100(3):032404CrossRefGoogle Scholar
  5. 5.
    Fallah HR, Ghasemi M, Hassanzadeh A et al (2006) The effect of deposition rate on electrical, optical and structural properties of tin-doped indium oxide (ITO) films on glass at low substrate temperature. Physica B 373(2):274–279CrossRefGoogle Scholar
  6. 6.
    Raoufi D (2009) Morphological characterization of ITO thin films surfaces. Appl Surf Sci 255(6):3682–3686CrossRefGoogle Scholar
  7. 7.
    Elmas S, Korkmaz Ş, Pat S (2013) Optical characterization of deposited ITO thin films on glass and PET substrates. Appl Surf Sci 276:641–645CrossRefGoogle Scholar
  8. 8.
    Choukourov A, Hanuš J, Kousal J et al (2006) Plasma polymer films from sputtered polyimide. Vacuum 81(4):517–526CrossRefGoogle Scholar
  9. 9.
    Oh CS, Lee SM, Kim EH et al (2012) Electro-optical properties of index matched ITO-PET film for touch panel application. Mol Cryst Liq Cryst 568(1):32–37CrossRefGoogle Scholar
  10. 10.
    Kim DH, Park MR, Lee GH (2006) Preparation of high quality ITO films on a plastic substrate using RF magnetron sputtering. Surf Coat Technol 201(3–4):927–931CrossRefGoogle Scholar
  11. 11.
    Utsumi K, Matsunaga O, Takahata T (1998) Low resistivity ITO film prepared using the ultra high density ITO target. Thin Solid Films 334(1–2):30–34CrossRefGoogle Scholar
  12. 12.
    Zhang B, Dong X, Xu X et al (2007) Electrical and optical properties of ITO and ITO: Zr transparent conducting films. Mater Sci Semicond Process 10(6):264–269CrossRefGoogle Scholar
  13. 13.
    Raoufi D, Kiasatpour A, Fallah HR et al (2007) Surface characterization and microstructure of ITO thin films at different annealing temperatures. Appl Surf Sci 253(23):9085–9090CrossRefGoogle Scholar
  14. 14.
    Shen Z, Zhao C, Feng W et al (2009) Mechanism of degradation of the electrical properties of pellicular antistatic thermal control coatings under near ultraviolet irradiation. Spacecr Environ Eng 26(5):415–418 (in Chinese) Google Scholar
  15. 15.
    Wang N, Yu J, Lin H et al (2009) Indium-tin oxide conductive films on flexible substrates deposited by DC magnetron sputtering method. Proc SPIE Int Soc Opt Eng.  https://doi.org/10.1117/12.830881 Google Scholar
  16. 16.
    Zhao Y, Li L, Xu M et al (2008) Preparation and irradiation resistant properties’ research of antistatic discharge films. Vac Cryog 14(4):215–218 (in Chinese) Google Scholar
  17. 17.
    Adorjan AJ, Alexander C, Blanchard TL et al (1999) Highly transparent arcproof films for space applications. MRS Online Proc Libr Arch.  https://doi.org/10.1557/PROC-551-101 Google Scholar

Copyright information

© Tianjin University and Springer-Verlag GmbH Germany, part of Springer Nature 2018

Authors and Affiliations

  • Chao Zhou
    • 1
  • Hui Zhou
    • 1
  • Yanchun He
    • 1
  • Miao Yang
    • 1
  • Yuqing Xiong
    • 1
  • Lingmao Xu
    • 1
    Email author
  • Yi Wang
    • 1
  1. 1.Science and Technology on Vacuum Technology and Physics LaboratoryLanzhou Institute of PhysicsLanzhouChina

Personalised recommendations