Skip to main content
Log in

Assessment of the high precision of global least squares stitching over large measuring areas

  • Published:
Journal of Mechanical Science and Technology Aims and scope Submit manuscript

Abstract

A 3D stitching algorithm was developed to measure wide-range data without reducing lateral resolution. This algorithm can correct X- and Y-axis rotational errors and Z-axis translational errors, as well as minimize the propagation of stitching error using an overall squared stitching method. Furthermore, the coordinate relation of adjacent areas is clearly defined to facilitate proper implementation of the algorithm. The developed algorithm has been applied with simulated and actual measured data to verify that it can stitch various types of data. The stitching accuracy on the common stitching area was evaluated using the Monte-Carlo method as the noise level increased to determine the criteria on measuring conditions. The stitching error was validated to be very small and to occur at the sub-nanometer level.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. T. G. Mathia, P. Pawlus and M. Wieczorowski, Recent trends in surface metrology, Wear, 271 (2011) 494–508.

    Article  Google Scholar 

  2. T. V. Vorburger, H. G. Rhee, T. B. Renegar, J. F. Song and A. Zheng, Comparison of optical and stylus methods for measurement of surface texture, Int. J. Adv. Manuf. Technol., 33 (12) (2007) 110–118.

    Article  Google Scholar 

  3. D. H. Lee and N. G. Cho, Assessment of surface profile data acquired by a stylus profilometer, Meas. Sci. Technol., 23 (10) (2012) 5601.

    Article  Google Scholar 

  4. D. H. Lee, 3-Dimensional profile distortion measured by stylus type surface profilometer, Measurement, 46 (1) (2013) 803–814.

    Article  Google Scholar 

  5. K. Nemoto, K. Yanagi, M. Aketagawa, I. Yoshida, M. Uchidate, T. Miyaguchi and M. Maruyama, Development of a roughness measurement standard with irregular surface to-pography for improving 3D surface texture measurement, Meas. Sci. Technol., 20 (8) (2009) 4023.

    Article  Google Scholar 

  6. C. F. Cheung, K. Hu, X. Q. Jiang and L. B. Kong, Characterization of surface defects in fast tool servo machining of microlens array using a pattern recognition and analysis method, Measurement, 43 (9) (2010) 1240–1249.

    Article  Google Scholar 

  7. G. Jäger, T. Hausotte, E. Manske, H.-J. Büchner, R. Mastylo, N. Dorozhovets and N. Hofmann, Nanomeasuring and nanopositioning engineering, Measurement, 43 (9) (2010) 1099–1105.

    Article  Google Scholar 

  8. C. J. Kim, Polynomial fit of interferograms, Appl. Opt., 21 (1982) 4521–4525.

    Article  Google Scholar 

  9. W. Cheng and M. Chen, Transformation and connection of subapertures in the multiaperture overlap-scanning technique for large optics tests, Optical Engineering, 32 (1993) 1947–1950.

    Article  Google Scholar 

  10. J. Fleig, P. Dumas, P. E. Murphy and G. W. Forbes, An automated subaperture stitching interferometer workstation for spherical and aspherical surfaces, Proc. SPIE, 5188 (2003) 296–307.

    Article  Google Scholar 

  11. G. H. Kim and D. W. Lee, Stitching algorithm for aspheric lenses, Proc. KSMTE Autumn Conference (2006) 63–68.

    Google Scholar 

  12. P. Zhang, H. Zhao, X. Zhou and J. Li, Sub-aperture stitching interferometry using stereovision positioning technique, Opt. Express, 18 (2010) 15216–15222.

    Article  Google Scholar 

  13. A. Germak and C. Origlia, Investigations of new possibilities in the calibration of diamond hardness indenters geometry, Measurement, 44 (2) (2011) 351–358.

    Article  Google Scholar 

  14. S. Se and P. Jasiobedzki, Photo-realistic 3D model reconstruction, Proc. ICRA (2006) 3076–3082.

    Google Scholar 

  15. B. Ma, T. Zimmermann, M. Rohde, S. Winkelbach, F. He, W. Lindenmaier and K. Dittmar, Use of Autostitch for automatic stitching of microscope images, Micron, 38 (2007) 492–499.

    Article  Google Scholar 

  16. D. Mohammadalizadeh, M. Packirisamy and S. Narayanswamy, Stitched acousto-optic modulator stroboscopic interferometry for characterizing larger microstructures, Measurement, 43 (6) (2010) 810–821.

    Article  Google Scholar 

  17. M. A. Schmucker and B. W. Becker, Method of combining multiple sets of overlapping surface-profile interferometric data to produce a continuous composite map, US Patent: 6,185,315 B1 (2001).

    Google Scholar 

  18. M. Bray, Stitching interferometer for large plano optics using a standard interferometer, Proc. SPIE, 3134 (1997) 39–50.

    Article  Google Scholar 

  19. Arun, K. Somani, T. S. Huang and S. D. Blostein, Leastsquares fitting of two 3-D point sets, Pattern Analysis and Machine Intelligence, IEEE Transactions on, 5 (1987) 698–700.

    Article  Google Scholar 

  20. B. E. Catanzaro, J. A. Thomas and E. J. Cohen, Comparison of full-aperture interferometry to subaperture stitched interferometry for a large-diameter fast mirror, Proc. SPIE, 4444 (2001) 224–237.

    Article  Google Scholar 

  21. D. H. Lee and N. G. Cho, The 3-d.o.f. stitching method of 3 dimensional measured data for high precision and large measuring area, Proc. KSMTE spring conference (2012) 254.

    Google Scholar 

  22. D. H. Lee and N. G. Cho, Five degree of freedom stitching method and system of three dimensional profile data, KR patent: 10-2012-0077762 (2012).

    Google Scholar 

  23. M. Otsubo, K. Okada and J. Tsujiuchi, Measurement of large plane surface shape with interferometric aperture synthesis, Proc. SPIE, 1720 (1992) 444–447.

    Article  Google Scholar 

  24. M. Otsubo, K. Okada and J. Tsujiuchi, Measurement of large plane surface shapes by connecting small-aperture interferograms, Optical Engineering, 33 (2) (1994) 608–613.

    Article  Google Scholar 

  25. J. C. Wyant and J. Schmit, Large field of view, high spatial resolution, surface measurements, International Journal of Machine Tools and Manufacture, 38.5 (1998) 691–698.

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Nahm Gyoo Cho.

Additional information

Recommended by Associate Editor Jongsoo Lee

Dong-Hyeok Lee received his B.S. degree in mechanical engineering in 2009 and his M.S. degree in mechanical design and mechatronics from Hanyang University, Republic of Korea, in 2011. He is currently pursuing a Ph.D. degree in mechanical design and mechatronics from Hanyang University, Seoul, Republic of Korea. His research interests include the area of surface texture, optical instruments, stereo vision, force sensors, error motion, precision stages, and applications.

Min-Gyu Kim received his B.S. degree in mechanical engineering in 2010 and his M.S. degree in mechanical design and mechatronics from Hanyang University, Republic of Korea, in 2012. He is currently pursuing a Ph.D. degree in mechanical design and production engineering from Hanyang University, Seoul, Republic of Korea. His research interests include the area of force sensors, stereo vision, error motion, and applications.

Nahm Gyoo Cho is a full-time professor of the Department of Mechanical Engineering at Hanyang University. He received his engineering doctorate degree from Tokyo Institute of Technology in 1994. His fields of interest include mechanical measurement, precision engineering, and renewable energy technology.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Lee, DH., Kim, MG. & Cho, N.G. Assessment of the high precision of global least squares stitching over large measuring areas. J Mech Sci Technol 29, 687–696 (2015). https://doi.org/10.1007/s12206-015-0128-8

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s12206-015-0128-8

Keywords

Navigation