Integrated design of MEMS: aiming at manufacturability

  • Matthieu Museau
  • Cédric Masclet
  • Serge Tichkiewitch
Original Paper
First Online:
Received:
Revised:
Accepted:

Abstract

This paper is a first attempt to qualify the design process in the field of MEMS product. Through this study, we try to analyse how the issue of manufacturability is addressed in a context of integrated design. This implies to understand specificities of the manufacturing process involved in the realization of these products (we focus on process derived from VLSI industry). Then we look at the main current design methodologies to understand how the manufacturing is being taken into account. Computer aided tools associated to these methodologies are presented at the same time. Finally, we conclude on the need of specifications for a design methodology that would provide designers with greater independence from manufacturing constraints.

Keywords

MEMS Manufacturing constraints Design methodology Multi-view 
This is a preview of subscription content, log in to check access.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    De Grave, A.: Conception intégrée de micro-systèmes électro-mécaniques. PhD thesis, University Joseph Fourier, 3S Laboratory, Grenoble, France (2004)Google Scholar
  2. 2.
    De Grave, A., Masclet, C., Brissaud, D.: Integrated design of mems. In: Proceedings of MIT’04, pp. 67–72, Constanta, October 4–5th MIT’04 (2004)Google Scholar
  3. 3.
    Chung C.-K., Tsai M.-Q., Tsai P.-H., Lee C. (2004). Fabrication and characterization of amorphous si films by pecvd for mems. J. Micromech. Microeng. 15: 136–142 CrossRefGoogle Scholar
  4. 4.
    Chung C.-K. (2003). Modelling and fabrication of step height control of a multilevel si(100) structure in koh solution. J. Micromech. Microeng. 14: 341–346 CrossRefGoogle Scholar
  5. 5.
    Anderson D.M. (2004). Design for manufacturing and concurrent engineering. CIM press, California Google Scholar
  6. 6.
    da Silva, M.G., Giasolli, R., Cunningham, S., DeRoo, D.: Mems design for manufacturability (dfm). In: Sensor Expo and Conference, Boston, Fall (2002)Google Scholar
  7. 7.
    Riviere-Cazaux, L., Lucas, K., Fitch, J.: Integration of design for manufacturability (dfm) practices in design flows. In: Sixth International Symposium on Quality of Electronic Design, pp. 102–106. ISQED’05 (2005)Google Scholar
  8. 8.
    Schröpfer, G., McNie, M., da Silva, M.G., Davies, R., Rickard, A., Musalem, F.-X.: Designing manufacturable mems in cmos compatible processes - methodology and case studies. In: SPIE’s Photonic conference, MEMS, MOEMS and Micromachining proceedings, Strasbourg, 26–30th April (2004)Google Scholar
  9. 9.
    Zha X.F., Du H. (2003). Manufacturing process and material selection in concurrent collaborative design of mems devices. J. Micromech. Microeng. 13: 509–552 CrossRefGoogle Scholar
  10. 10.
    Mems and technology exchange. http://www.mems-exchange.org, September (2005)Google Scholar
  11. 11.
    Roucoules L., Tichkiewitch S. (2000). Code : a co-operative design environment. a new generation of cad systems. Concurrent Eng. Res. Appl. 8(4): 263–280 CrossRefGoogle Scholar

Copyright information

© Springer Verlag France 2007

Authors and Affiliations

  • Matthieu Museau
    • 1
  • Cédric Masclet
    • 1
  • Serge Tichkiewitch
    • 1
  1. 1.G-Scop, INP GrenobleUJF, CNRSGrenoble Cedex 1France

Personalised recommendations