Review of Recent Advances in Applications of Vapor-Phase Material Infiltration Based on Atomic Layer Deposition
- 188 Downloads
Polymer–inorganic hybrid nanocomposites exhibit enhanced material properties, combining the advantages of both their organic and inorganic subcomponents. Extensive research is being carried out to functionalize polymers towards various improved physicochemical characteristics such as electrical, optical, and mechanical properties for various applications. Vapor-phase material infiltration is an emerging hybridization route, derived from atomic layer deposition, which facilitates uniform incorporation of inorganic entities into a polymer matrix, leading to novel applications in fields such as microelectronics, energy storage, smart coatings, and smart fabrics. In this article, recent advances in employing vapor-phase material infiltration as a hybridization and nanopatterning technique for various application avenues are reviewed.
The research was in part carried out at the Center for Functional Nanomaterials (CFN), Brookhaven National Laboratory (BNL), which is supported by the US Department of Energy, Office of Basic Energy Sciences, under Contract No. DE-SC0012704.
- 2.W.S. Khan, N.N. Hamadneh, and W.A. Khan, Polymer nanocomposites—synthesis techniques, classification and properties, in Science and applications of Tailored Nanostructures, ed. Professor Paolo Di Sia (Cheshire, United Kingdom: One Central Press, 2016), p. 50.Google Scholar
- 30.A. Rahman, M. Liu, and C. T. Black, J. Vac. Sci. Technol. B Nanotechnol. Microelectron. Mater. Process. Meas. Phenom. 32, 06FE02 (2014).Google Scholar
- 35.B. Gong, J.C. Spagnola, and G.N. Parsons, J. Vac. Sci. Technol. A Vacuum Surfaces Film. 30, 01A156 (2012).Google Scholar
- 38.D. Japić, I. Djerdj, M. Marinšek, and Z.C. Orel, Acta Chim. Slov. 60, 797 (2013).Google Scholar
- 48.R.P. Padbury and J.S. Jur, J. Vac. Sci. Technol. A Vacuum Surfaces Film. 33, 01A112 (2015).Google Scholar