Design and fabrication of 25-channel 200 GHz AWG based on Si nanowire waveguides
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A 25-channel 200 GHz arrayed waveguide grating (AWG) based on Si nanowire waveguides is designed, simulated and fabricated. Transfer function method is used in the simulation and error analysis of AWG with width fluctuations. The 25-channel 200 GHz AWG exhibits central channel insertion loss of 6.7 dB, crosstalk of −13 dB, and central wavelength of 1 560.55 nm. The error analysis can explain the experimental results of 25-channel 200 GHz AWG well. By using deep ultraviolet lithography (DUV) and inductively coupled plasma etching (ICP) technologies, the devices are fabricated on silicon- on-insulator (SOI) substrate.
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- Yu Kurata, Yusuke Nasu, Munehisa Tamura, Ryoichi Kasahara, Shinichi Aozasa, Takayuki Mizuno, Haruki Yokoyama, Satoshi Tsunashima, and Yoshifumi Muramoto, Optics Express 20, B264 (2012).Google Scholar
- H. P. S. Assefa, F. Horst, C. L. Schow, A. V. Rylyakov, W. M. J. Green, M. H. Khater, S. Kamlapurka, C. Reinholm, E. Kiewra, S. M. Shank, C. W. Baks, B. J. Offrein and Y. A. Vlasov, 250 Gbps 10-Channel WDM Silicon Photonics Receiver, IEEE 9th International Conference on Group IV Photonics, 162 (2012).Google Scholar
- T. Pinguet, B. Analui, G. Masini, V. Sadagopan and S. Gloeckner, 40 Gbps Monolithically Integrated Transceivers in CMOS Photonics, Conference on Silicon Photonics III, 689805 (2008).Google Scholar
- D. V. Thourhout, M. Vanslembrouck, P. Dumon, S. Pathak and W. Bogaerts, Optics Express 20, B493 (2012).Google Scholar