Optoelectronics Letters

, Volume 3, Issue 2, pp 81–84 | Cite as

A carbon nanotube-based sensing element

  • Yang Xing 
  • Zhou Zhao-ying 
  • Wu Ying 
  • Zhang Jin 
  • Zhang Ying-ying 
Article

Abstract

A carbon nanotube-based(CNT) sensing element is presented, which consists of substrate, insulating layer, electrodes, carbon nanotube and measuring circuit. The sensing components are a single or array of CNTs, which are located on the two electrodes. The CNT-based sensing element is fabricated by CVD (chemical vapor deposition)-direct-growth on micro-electrodes. The sensing model and measurement method of electromechanical property are also presented. Finally, the voltage-current characteristics are measured, which show that the CNT-based sensing element has good electrical properties.

CLC number

TP212.14 

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Copyright information

© Tianjin University of Technology 2007

Authors and Affiliations

  • Yang Xing 
    • 1
    • 2
    • 3
  • Zhou Zhao-ying 
    • 1
    • 2
    • 3
  • Wu Ying 
    • 1
    • 2
    • 3
  • Zhang Jin 
    • 4
  • Zhang Ying-ying 
    • 4
  1. 1.MEMS Lab., Department of Precision Instruments & MechanologyTsinghua UniversityBeijingChina
  2. 2.State Key Lab. of Precision Measurement Technology and InstrumentationTsinghua UniversityBeijingChina
  3. 3.Micro-nano technology research centerTsinghua UniversityBeijingChina
  4. 4.Department of ChemistryPeking UniversityBeijingChina

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