Relationship between subsurface damage and surface roughness of ground optical materials

  • Li Sheng-yi  (李圣怡)Email author
  • Wang Zhuo  (王 卓)
  • Wu Yu-lie  (吴宇列)


A theoretical model of relationship between subsurface damage and surface roughness was established to realize rapid and non-destructive measurement of subsurface damage of ground optical materials. Postulated condition of the model was that subsurface damage depth and peak-to-valley surface roughness are equal to depth of radial and lateral cracks in brittle surface induced by small-radius (radius ⩽ 200 μm) spherical indenter, respectively. And contribution of elastic stress field to the radial cracks propagation was also considered in the loading cycle. Subsurface damage depth of ground BK7 glasses was measured by magnetorheological finishing spot technique to validate theoretical ratio of subsurface damage to surface roughness. The results show that the ratio is directly proportional to load of abrasive grains and hardness of optical materials, while inversely proportional to granularity of abrasive grains and fracture toughness of optical materials. Moreover, the influence of the load and fracture toughness on the ratio is more significant than the granularity and hardness, respectively. The measured ratios of 80 grit and 120 grit fixed abrasive grinding of BK7 glasses are 5.8 and 5.4, respectively.

Key words

subsurface damage spherical indenter optical materials grinding process magnetorheological finishing 


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  1. [1]
    FINE K R, GARBE R, GIP T, et al. Non-destructive, real time direct measurement of subsurface damage[C]// Proceedings of SPIE. Bellingham, 2005: 105–110.Google Scholar
  2. [2]
    CAMPBELL J H, HAWLEY-FEDDER R A, STOLZ C J, et al. NIF optical materials and fabrication technologies: An overview[C]// Proceedings of SPIE. Bellingham, 2004: 84–101.Google Scholar
  3. [3]
    SHEN J, LIU S H, YI K, et al. Subsurface damage in optical substrates[J]. Optik, 2005, 116: 288–294.CrossRefGoogle Scholar
  4. [4]
    LIU Shu-jiang, LU An-xian, TANG Xiao-dong, et al. Spectral properties of Yb3+-doped silicate and phosphate laser glass[J]. Journal of Central South University: Science and Technology, 2006, 37(3): 433–437. (in Chinese)Google Scholar
  5. [5]
    HAMZA A V, SIEKHAUS W J, RUBENCHIK A M, et al. Engineered defects for investigation of laser-induced damage of fused silica at 355 nm[C]// Proceedings of SPIE. Bellingham, 2002: 96–107.Google Scholar
  6. [6]
    GÉNIN F Y, SALLEO A, PISTOR T V, et al. Role of light intensification by cracks in optical breakdown on surfaces[J]. Journal of the Optical Society of America, 2001, 18(10): 2607–2616.CrossRefGoogle Scholar
  7. [7]
    HED P P, EDWARDS D F. Optical glass fabrication technology. 2: Relationship between surface roughness and subsurface damage[J]. Applied Optics, 1987, 26(21): 4677–4680.CrossRefGoogle Scholar
  8. [8]
    YANG F Q. Effect of subsurface damage on indentation behavior or ground ULETM glass[J]. Journal of Non-Crystalline Solids, 2005, 351(54): 3861–3865.CrossRefGoogle Scholar
  9. [9]
    RANDI J A, LAMBROPOULOS J C, JACOBS S D. Subsurface damage in some single crystalline optical materials[J]. Applied Optics, 2005, 44(12): 2241–2249.CrossRefGoogle Scholar
  10. [10]
    LAMBROPOULOS J C. Material removal mechanisms from grinding to polishing[C]// Finishing of Advanced Ceramics and Glasses, Ceramic Transactions. Westerville, 1999: 113–128.Google Scholar
  11. [11]
    MILLER P E, SURATWALA T I, WONG L L, et al. The distribution of subsurface damage in fused silica[C]// Proceedings of SPIE. Bellingham, 2005: 1–13.Google Scholar
  12. [12]
    ZHOU Xiao-ping, LING Tong-hua. Elastoplastic analysis for infinite plate with centric crack loaded by two pairs of point shear forces[J]. Journal of Central South University of Technology, 2005, 12(Suppl. 1): 189–193.CrossRefGoogle Scholar
  13. [13]
    COOK R F, PHARR G M. Direct observation and analysis of indentation cracking in glasses and ceramics[J]. Journal of the American Ceramic Society, 1990, 73(4): 787–817.CrossRefGoogle Scholar
  14. [14]
    MARSHALL D B. Geometrical effects in elastic/plastic indentation[J]. Journal of the American Ceramic Society, 1983, 67(1): 57–60.CrossRefGoogle Scholar
  15. [15]
    LAWN B R, EVANS A G, MARSHALL D B. Elastic/Plastic indentation damage in ceramics: The median/radial crack system[J]. Journal of the American Ceramic Society, 1982, 63(9/10): 574–581.Google Scholar
  16. [16]
    ANSTIS G R, CHANTIKUL P, LAWN B R, et al. A critical evaluation of indentation techniques for measuring fracture toughness: I[J]. Journal of the American Ceramic Society, 1981, 64(9): 533–538.CrossRefGoogle Scholar
  17. [17]
    MARSHALL D B, LAWN B R, EVANS A G. Elastic/Plastic indentation damage in ceramics: The lateral crack system[J]. Journal of the American Ceramic Society, 1982, 65(11): 561–566.CrossRefGoogle Scholar

Copyright information

© Central South University Press, Sole distributor outside Mainland China: Springer 2007

Authors and Affiliations

  • Li Sheng-yi  (李圣怡)
    • 1
    Email author
  • Wang Zhuo  (王 卓)
    • 1
  • Wu Yu-lie  (吴宇列)
    • 1
  1. 1.College of Mechatronic Engineering and AutomationNational University of Defense TechnologyChangshaChina

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