Frontiers of Chemical Science and Engineering

, Volume 13, Issue 3, pp 485–492 | Cite as

Improvement in growth yield of single-walled carbon nanotubes with narrow chirality distribution by pulse plasma CVD

  • Bin Xu
  • Toshiro Kaneko
  • Toshiaki KatoEmail author
Research Article
Part of the following topical collections:
  1. The Future of Plasma Nanoscience


A pulse plasma chemical vapor deposition (CVD) technique was developed for improving the growth yield of single-walled carbon nanotubes (SWNTs) with a narrow chirality distribution. The growth yield of the SWNTs could be improved by repetitive short duration pulse plasma CVD, while maintaining the initial narrow chirality distribution. Detailed growth dynamics is discussed based on a systematic investigation by changing the pulse parameters. The growth of SWNTs with a narrow chirality distribution could be controlled by the difference in the nucleation time required using catalysts comprising relatively small or large particles as the key factor. The nucleation can be controlled by adjusting the pulse on/off time ratio and the total processing time.


single-walled carbon nanotubes chirality-controlled synthesis pulse plasma chemical vapor deposition 


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.



This work was supported in part by the Grant-in-Aid for Scientific Research B (Grant No. 16H03892), Grant-in-Aid for Challenging Exploratory Research (Grant No. 16K13707) from JSPS KAKENHI, JST-PRESTO (Grant No. J170002074), and the Cooperative Research Project Program of the Research Institute of Electrical Communication, Tohoku University.


  1. 1.
    Ueda A, Matsuda K, Tayagaki T, Kanemitsu Y. Carrier multiplication in carbon nanotubes studied by femtosecond pump-probe spectroscopy. Applied Physics Letters, 2008, 92(23): 233105CrossRefGoogle Scholar
  2. 2.
    Javey A, Guo J, Wang Q, Lundstrom M, Dai H. Ballistic carbon nanotube field-effect transistors. Nature, 2003, 424(6949): 654–657CrossRefPubMedGoogle Scholar
  3. 3.
    Qiu C, Zhang Z, Xiao M, Yang Y, Zhong D, Peng L M. Scaling carbon nanotube complementary transistors to 5-nm gate lengths. Science, 2017, 355(6322): 271–276CrossRefPubMedGoogle Scholar
  4. 4.
    He X, Fujimura N, Lloyd J M, Erickson K J, Talin A A, Zhang Q, Gao W, Jiang Q, Kawano Y, Hauge R H, et al. Carbon nanotube terahertz detector. Nano Letters, 2014, 14(7): 3953–3958CrossRefPubMedGoogle Scholar
  5. 5.
    Kim H S, Kim W J, Strano M S, Han J H. Optical detection of argon gas flow based on vibration-induced change in photoluminescence of a semiconducting single-walled carbon nanotube bundle. Journal of Nanoscience and Nanotechnology, 2014, 14(12): 9131–9133CrossRefPubMedGoogle Scholar
  6. 6.
    Lolli G, Zhang L, Balzano L, Sakulchaicharoen N, Tan Y, Resasco D E. Tailoring (n, m) structure of single-walled carbon nanotubes by modifying reaction conditions and the nature of the support of CoMo catalysts. Journal of Physical Chemistry B, 2006, 110(5): 2108–2115CrossRefGoogle Scholar
  7. 7.
    Loebick C Z, Derrouiche S, Marinkovic N, Wang C, Hennrich F, Kappes M M, Haller G L, Pfefferle L D. Effect of manganese addition to the Co-MCM-41 catalyst in the selective synthesis of single wall carbon nanotubes. Journal of Physical Chemistry C, 2009, 113(52): 21611–21620CrossRefGoogle Scholar
  8. 8.
    Loebick C Z, Derrouiche S, Fang F, Li N, Haller G L, Pfefferle L D. Effect of chromium addition to the Co-MCM-41 catalyst in the synthesis of single wall carbon nanotubes. Applied Catalysis A, General, 2009, 368(1–2): 40–49CrossRefGoogle Scholar
  9. 9.
    Ghorannevis Z, Kato T, Kaneko T, Hatakeyama R. Narrow-chirality distributed single-walled carbon nanotube growth from nonmagnetic catalyst. Journal of the American Chemical Society, 2010, 132(28): 9570–9572CrossRefPubMedGoogle Scholar
  10. 10.
    Zhang L, Hou P, Li S, Shi C, Cong H, Liu C, Cheng H. In situ TEM observations on the sulfur-assisted catalytic growth of single-wall carbon nanotubes. Journal of Physical Chemistry Letters, 2014, 5(8): 1427–1432CrossRefPubMedGoogle Scholar
  11. 11.
    Li P, Zhang X, Liu J. Aligned single-walled carbon nanotube arrays from rhodium catalysts with unexpected diameter uniformity independent of the catalyst size and growth temperature. Chemistry of Materials, 2016, 28(3): 870–875CrossRefGoogle Scholar
  12. 12.
    He M, Jiang H, Kauppi I, Fedotov P V, Chernov A I, Obraztsova E D, Cavalca F, Wagner J B, Hansen T W, Sainio J, et al. Insights into chirality distributions of single-walled carbon nanotubes grown on different CoxMg1 xO solid solutions. Journal of Materials Chemistry. A, Materials for Energy and Sustainability, 2014, 2(16): 5883–5889CrossRefGoogle Scholar
  13. 13.
    Yang F, Wang X, Zhang D, Yang J, Luo D, Xu Z, Peng F, Li X, Li R, Li Y, et al. Chirality-specific growth of single-walled carbon nanotubes on solid alloy catalysts. Nature, 2014, 510(7506): 522–524CrossRefPubMedGoogle Scholar
  14. 14.
    Yang F, Wang X, Si J, Zhao X, Qi K, Jin C, Zhang Z, Li M, Zhang D, Yang J, et al. Water-assisted preparation of high-purity semiconducting (14,4) carbon nanotubes. ACS Nano, 2017, 11(1): 186–193CrossRefPubMedGoogle Scholar
  15. 15.
    Yang F, Wang X, Zhang D, Qi K, Yang J, Xu Z, Li M, Zhao X, Bai X, Li Y. Growing zigzag (16,0) carbon nanotubes with structure-defined catalysts. Journal of the American Chemical Society, 2015, 137(27): 8688–8691CrossRefPubMedGoogle Scholar
  16. 16.
    Xu B, Kaneko T, Shibuta Y, Kato T. Preferential synthesis of (6,4) single-walled carbon nanotubes by controlling oxidation degree of Co catalyst. Scientific Reports, 2017, 7(11149): 1–9Google Scholar
  17. 17.
    He M, Fedotov P V, Chernov A, Obraztsova E D, Jiang H, Wei N, Cui H, Sainio J, Zhang W, Jin H, et al. Chiral-selective growth of single-walled carbon nanotubes on Fe-based catalysts using CO as carbon source. Carbon, 2016, 108: 521–528CrossRefGoogle Scholar
  18. 18.
    Rao R, Pierce N, Liptak D, Hooper D, Sargent G, Semiatin S L, Curtarolo S, Harutyunyan A R, Maruyama B. Revealing the impact of catalyst phase transition on carbon nanotube growth by in situ Raman spectroscopy. ACS Nano, 2013, 7(2): 1100–1107CrossRefPubMedGoogle Scholar
  19. 19.
    Wang B, Poa C H P, Wei L, Li L, Yang Y, Chen Y. (n, m) Selectivity of single-walled carbon nanotubes by different carbon precursors on Co-Mo catalysts. Journal of the American Chemical Society, 2007, 129(29): 9014–9019CrossRefPubMedGoogle Scholar
  20. 20.
    Picher M, Anglaret E, Arenal R, Jourdain V. Processes controlling the diameter distribution of single-walled carbon nanotubes during catalytic chemical vapor deposition. ACS Nano, 2011, 5(3): 2118–2125CrossRefPubMedGoogle Scholar
  21. 21.
    Wang J, Liu P, Xia B, Wei H, Wei Y, Wu Y, Liu K, Zhang L, Wang J, Li Q, et al. Observation of charge generation and transfer during CVD growth of carbon nanotubes. Nano Letters, 2016, 16(7): 4102–4109CrossRefPubMedGoogle Scholar
  22. 22.
    Kato T, Hatakeyama R. Direct growth of short single-walled carbon nanotubes with narrow-chirality distribution by time-programmed plasma chemical vapor deposition. ACS Nano, 2010, 4(12): 7395–7400CrossRefPubMedGoogle Scholar
  23. 23.
    Xu B, Kato T, Murakoshi K, Kaneko T. Effect of ion impact on incubation time of single-walled carbon nanotubes grown by plasma chemical vapor deposition. Plasma and Fusion Research, 2014, 9: 1206075–1–3CrossRefGoogle Scholar
  24. 24.
    Maruyama S, Kojima R, Miyauchi Y, Chiashi S, Kohno M. Low-temperature synthesis of high-purity single-walled carbon nano-tubes from alcohol. Chemical Physics Letters, 2002, 360(3–4): 229–234CrossRefGoogle Scholar
  25. 25.
    Kato T, Jeong G H, Hirata T, Hatakeyama R. Structure control of carbon nanotubes using radio-frequency plasma enhanced chemical vapor deposition. Thin Solid Films, 2004, 457(1): 2–6CrossRefGoogle Scholar
  26. 26.
    Shiau S H, Liu C W, Gau C, Dai B T. Growth of a single-wall carbon nanotube film and its patterning as an n-type field effect transistor device using an integrated circuit compatible process. Nanotechnology, 2008, 19(10): 105303CrossRefPubMedGoogle Scholar
  27. 27.
    O’Connell M J, Bachilo S M, Huffman C B, Moore V C, Strano M S, Haroz E H, Rialon K L, Boul P J, Noon W H, Kittrell C, et al. Band gap fluorescence from individual single-walled carbon nanotubes. Science, 2002, 297(5581): 593–596CrossRefPubMedGoogle Scholar
  28. 28.
    Weisman R B, Bachilo S M. Dependence of optical transition energies on structure for single-walled carbon nanotubes in aqueous suspension: An empirical Kataura plot. Nano Letters, 2003, 3(9): 1235–1238CrossRefGoogle Scholar
  29. 29.
    Hou B, Wu C, Inoue T, Chiashi S, Xiang R, Maruyama S. Extended alcohol catalytic chemical vapor deposition for efficient growth of single-walled carbon nanotubes thinner than (6,5). Carbon, 2017, 119: 502–510CrossRefGoogle Scholar
  30. 30.
    Ostrikov K, Mehdipour H. Thin single-walled carbon nanotubes with narrow chirality distribution: Constructive interplay of plasma and Gibbs-Thomson effects. ACS Nano, 2011, 5(10): 8372–8382CrossRefPubMedGoogle Scholar
  31. 31.
    Lifshitz I, Slyozov V. The kinetics of precipitation from supersaturated solid solutions. Journal of Physics and Chemistry of Solids, 1961, 19(1–2): 35–50CrossRefGoogle Scholar

Copyright information

© Higher Education Press and Springer-Verlag GmbH Germany, part of Springer Nature 2019

Authors and Affiliations

  1. 1.Department of Electronic EngineeringTohoku UniversitySendaiJapan
  2. 2.Japan Science and Technology Agency (JST)-PRESTOSendaiJapan

Personalised recommendations