Influence of Bias Voltage and CH4/N2 Gas Ratio on the Structure and Mechanical Properties of TiCN Coatings Deposited by Cathodic Arc Deposition Method
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This article presents a study of the influence of the bias voltage and CH4/N2 gas ratio on the structure and mechanical properties of TiCN coatings. The coatings are deposited by cathodic arc deposition technology from Ti cathodes under an atmosphere of a mixture of CH4 and N2 gasses. XRD analysis shows that an increase in the methane flow changes the preferential orientation of the coating from (111) to (200) and results in a refinement of the structure (grain size reduction from 23 to 7 nm). SEM analysis shows that the coatings are stoichiometric. It was demonstrated that the bias voltage has an influence on the grain size, hardness and elasticity module. The highest hardness value of 52.5 GPa was measured at the coatings lacking a clear preferential orientation. The adhesion of the coatings showed a critical load in the range of 29-64 N.
Keywordscathodic arc deposition nanohardness TiCN coatings XRD analysis
This paper was supported through the project “Special transformation mechanisms in drives with electronic cams” Registration Number FV20547, obtained through the financial support of the Ministry of Industry and Trade in the program MPO TRIO and the Technical University of Liberec as part of the project Technical University of Liberec, Faculty of Mechanical Engineering with the support of the Institutional Endowment for the Long Term Conceptual Development of Research Institutes, as provided by the Ministry of Education, Youth and Sports of the Czech Republic in the year 2018. The research was also funded by the Governmental program “Science,” Research Project 11.3683.2017/4.6 as well as Tomsk Polytechnic University Competitiveness Enhancement Program.
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