Journal of Materials Engineering and Performance

, Volume 23, Issue 4, pp 1204–1213 | Cite as

Structural, Optical, Electrical, and Dielectric Properties of the Spray-Deposited WO3 Thin Films

  • V. V. Ganbavle
  • G. L. Agawane
  • A. V. Moholkar
  • J. H. Kim
  • K. Y. Rajpure


Studies on effect of the substrate temperature on physicochemical properties of WO3 thin films prepared using spray pyrolysis technique have been presented. Raman spectra of the film shows presence of W-O-W network with stretching and bending vibrations which revealed monoclinic structure of WO3 which is confirmed by XRD studies. XPS studies show that films are sub-stoichiometric and O/W ratio is 2.87, with W present in two valence states W+5 and W+6 with ratio of 0.21. Smallest crystallite size (28 nm) is observed for the film deposited at 425 °C, and on either side crystallite size is larger. Optical studies show band gap energy 2.6 eV and NUV, blue and green photo-emissions from WO3 films. Scanning electron micrographs depict wired network of the WO3, and AFM shows rough nature of the films. The thermo-emf is found to be linearly changing with temperature difference and decreases with increase in the substrate temperature.


Dielectric properties optical properties photoelectron spectroscopy Raman spectroscopy thin films 



This work is supported by UGC through financial support by major research project entitled “Photocatalytic degradation of waste water using sprayed tungsten trioxide (WO3) thin films”. No. 41-869/2012. One of the authors (V. V. Ganbavle) is thankful to UGC New Delhi, for awarding fellowship through UGC-BSR scheme.


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Copyright information

© ASM International 2014

Authors and Affiliations

  • V. V. Ganbavle
    • 1
  • G. L. Agawane
    • 2
  • A. V. Moholkar
    • 1
  • J. H. Kim
    • 2
  • K. Y. Rajpure
    • 1
  1. 1.Electrochemical Materials Laboratory, Department of PhysicsShivaji UniversityKolhapurIndia
  2. 2.Department of Materials Science and EngineeringChonnam National UniversityGwangjuSouth Korea

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