Magnetic Properties, Microwave Characteristics, and Thermal Stability of the FeCoAlN Films

  • Jun Zhou
  • Xudong Zhang
  • Shu Wang
  • Hu Wang
  • Jiangong Li
Article
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Abstract

FeCoAlN films were prepared by reactive radio frequency magnetron co-sputtering technique in an argon and nitrogen mixture atmosphere. The soft magnetic properties, GHz dynamic properties, and magnetic thermal stability of the FeCoAlN films were investigated. The FeCoAlN films deposited at N2/(Ar + N2) gas flux percentages larger than 8% have amorphous structure. The (Fe64.8Co35.2)96.3Al3.7N film as-deposited at the N2/(Ar + N2) gas flux percentage of 9% has good magnetic softness and uniaxial in-plane anisotropy, as demonstrated by the typical hysteresis loops along easy and hard axis. The magnetic thermal stability of the FeCoN films can be obviously improved by introduction of a high Al content. The (Fe64.8Co35.2)86.5Al13.5N films annealed at 400 °C for 1 h exhibit good magnetic softness and GHz dynamic properties with a saturation magnetization (μ0 M s) of 1.21 T, an easy axis coercive field (H ce) of 8.5 Oe, an anisotropy field (H k) of 35 Oe, a ferromagnetic resonance frequency (f r) of 1.89 GHz, and a real part of permeability (μ′) of 380. The dynamic characteristics can be described by the theoretical model based on Landau-Lifshitz-Gilbert (L-L-G) equation and eddy current dynamics.

Keywords

FeCoAlN thin films Magnetic property Thermal stability 
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Notes

Acknowledgments

This work was supported by the International S&T Cooperation Program (ISCP) of MOST under 2008DFA50340, the Specialized Research Foundation for the Doctoral Programs of MOE (20070730022), China, and the National Natural Science Foundation of China under 50872046.

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Copyright information

© ASM International 2009

Authors and Affiliations

  • Jun Zhou
    • 1
  • Xudong Zhang
    • 1
  • Shu Wang
    • 1
  • Hu Wang
    • 1
  • Jiangong Li
    • 1
  1. 1.MOE Laboratory for Magnetism and Magnetic Materials and Institute of Materials Science and EngineeringLanzhou UniversityLanzhouChina

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