Journal of Electronic Materials

, Volume 28, Issue 5, pp 432–436 | Cite as

Formation of nanometer-scale InAs islands on silicon

  • P. C. Sharma
  • K. W. Alt
  • D. Y. Yeh
  • D. Wang
  • K. L. Wang
Special Issue Paper


Three dimensional islands of InAs have been grown on Si (100) by using molecular-beam epitaxy to obtain nanometer-scale quantum dots. Morphological examination by atomic force microscopy revealed the formation of islands with narrow size distributions and high densities. For an approximate coverage of 1.2 monolayers of lnAs beyond the growth mode transition, our observations of a rapid evolution of island morphology are explained in terms of strain relaxing mechanisms in the early stages of InAs/Si heteroepitaxy.

Key words

Molecular beam epitaxy (MBE) quantum dots Stranski-Krastanow growth mode 


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Copyright information

© TMS-The Minerals, Metals and Materials Society 1999

Authors and Affiliations

  • P. C. Sharma
    • 1
  • K. W. Alt
    • 1
  • D. Y. Yeh
    • 1
  • D. Wang
    • 1
  • K. L. Wang
    • 1
  1. 1.Device Research Laboratory, Department of Electrical EngineeringUniversity of CaliforniaLos Angeles

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