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Development of Silicon-Embedded Supercapacitors Utilizing Atomic Layer Deposition and Plasma-Enhanced Chemical Vapor Deposition for Functionalization of Carbon Nanotube Electrodes

  • Topical Collection: Carbon-Based Materials for Energy Storage
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Abstract

Supercapacitors utilizing carbon nanotube (CNT) electrodes are next-generation energy storage systems. Various CNT functionalization and graphenation processes can enhance carbon nanotube charge densities, while room-temperature ionic liquids can enhance supercapacitor performance. Functionalization by atomic layer deposition of titania provides pseudocapacitive energy storage mechanisms, while graphenation increases the surface area of the electrodes. Utilizing patented silicon etch methods, a silicon-integrated structure was developed with functionalization and graphenation of the CNTs. The supercapacitors with CNT forests functionalized by titania have a specific energy of 39.4 Wh/kg, those with graphenated CNT forests have a specific energy of 26.0 Wh/kg, and the supercapacitors with both functionalizations have a specific energy of 63.4 Wh/kg. Compared to the supercapacitors using bare CNT forests, which have a specific energy of 2.6 Wh/kg, these results show that the addition of these functionalizations significantly improves the device performance.

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Acknowledgments

We would like to thank the Georgia Institute of Technology President’s Undergraduate Research Award (PURA) and EngeniusMicro via Defense Microelectronics Activity award HQ0727-14-P-1426 for funding this project.

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Authors and Affiliations

  1. Georgia Institute of Technology, Atlanta, GA, USA

    Ravi Konjeti, Julia Allen, Stephan Turano & Jud Ready

  2. EngeniusMicro, Atlanta, GA, USA

    Mike Kranz & Brian English

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  1. Ravi Konjeti
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  2. Julia Allen
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  3. Stephan Turano
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  5. Brian English
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Correspondence to Jud Ready.

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Konjeti, R., Allen, J., Turano, S. et al. Development of Silicon-Embedded Supercapacitors Utilizing Atomic Layer Deposition and Plasma-Enhanced Chemical Vapor Deposition for Functionalization of Carbon Nanotube Electrodes. J. Electron. Mater. 50, 5037–5048 (2021). https://doi.org/10.1007/s11664-021-08954-0

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  • DOI: https://doi.org/10.1007/s11664-021-08954-0

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