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High-Gain Ultraviolet Avalanche Photodiodes Using a ZnSe-Based Organic–Inorganic Hybrid Structure

  • Topical Collection: 19th International Conference on II-VI Compounds
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Abstract

We have developed high-gain and highly sensitive ZnSe-based organic–inorganic hybrid ultraviolet avalanche photodiodes (UV-APDs). The inorganic ZnSe-based wafers (i-ZnSSe active layer/n-ZnSSe) were grown by molecular beam epitaxy (MBE) on n-type GaAs substrates. The inorganic UV-transparent conducting polymer window layers of poly 3,4-ethylenedioxythiophene:poly-styrenesulfonate (PEDOT:PSS) were formed by spin-coating and a photolithography technique instead of the inkjet printing technique, which we previously reported. We have obtained a thin uniform window layer with a mesa-shaped edge by an optimized photolithography process. The leakage current before the breakdown voltage was suppressed to < 10−10 A/mm2, which is lower than that of the APD device fabricated by inkjet printing. The maximum external quantum efficiency was improved to ηmax = 70% (λ = 340 nm) using the photolithography technique compared with the inkjet printing (ηmax = 50%). The maximum responsivity was improved from 3 A/W to 10 A/W. The maximum multiplication factor was improved from M = 90 to M = 3100.

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References

  1. H. Ogino, A. Yoshikawa, M. Niki, K. Kamada, and T. Fukuda, J. Cryst. Growth 292, 239 (2006).

    Article  CAS  Google Scholar 

  2. J.B. Limb, D. Yoo, J.H. Ryou, W. Lee, S.C. Shen, R.D. Dupuis, M.L. Reed, C.J. Collins, M. Wraback, D. Hanser, E. Preble, N.M. Williams, and K. Evans, Appl. Phys. Lett. 89, 011112 (2006).

    Article  Google Scholar 

  3. Z. Vashaei, E. Cicek, C. Bayram, R. McClintok, and M. Razeghi, Appl. Phys. Lett. 96, 201908 (2010).

    Article  Google Scholar 

  4. A.K. Sood, J.W. Zeller, and Y.R. Puri, International Journal of Engineering Research and Technology. 10, 129 (2017).

    CAS  Google Scholar 

  5. Q. Cai, Q. Li, M. Li, Y. Tang, J. Wang, J. Xue, D. Chen, H. Lu, R. Zhang, and Y. Zheng, IEEE Photonics J. 11, 6801507 (2019).

    Google Scholar 

  6. X.G. Bai, X.Y. Guo, D.C. Mcintosh, H.D. Liu, and J.C. Campbell, IEEE J. Quantum Electron. 43, 1159 (2007).

    Article  CAS  Google Scholar 

  7. H. Zhu, X. Chen, J. Cai, and Z. Wu, Solid State Electron. 53, 7 (2009).

    Article  CAS  Google Scholar 

  8. H.D. Liu, D. Mcintosh, X.G. Bai, H.P. Pan, M.G. Liu, J.C. Campbell, and H.Y. Cha, IEEE Photonics Technol. Lett. 20, 1551 (2008).

    Article  CAS  Google Scholar 

  9. J. Kou, K.K. Tian, C. Chu, Y. Zhang, X. Zhou, Z. Feng, and Z.H. Zhang, Nanoscale Res. Lett. 14, 396 (2019).

    Article  CAS  Google Scholar 

  10. H. Ishikura, T. Abe, N. Fukuda, H. Kasada, and K. Ando, Appl. Phys. Lett. 76, 1069 (2000).

    Article  CAS  Google Scholar 

  11. H. Ishikura, Y. Fukunaga, T. Kubota, H. Maeta, M. Adachi, T. Abe, H. Kasada, and K. Ando, Phys. Status Sollidi B 229, 1085 (2002).

    Article  CAS  Google Scholar 

  12. T. Abe, K. Ando, K. Ikumi, H. Maeta, J. Naruse, K. Miki, A. Ehara, and H. Kasada, Jpn. J. Appl. Phys. 44, L508 (2005).

    Article  CAS  Google Scholar 

  13. Y. Inagaki, M. Ebisu, M. Ohtsuki, N. Ayuni, T. Shimizu, T. Abe, H. Kasada, and K. Ando, Phys. Status Solidi C 9, 1852 (2012).

    Article  CAS  Google Scholar 

  14. J. Yu, C.X. Shan, X.M. Huang, X.W. Zhang, S.P. Wang, and D.Z. Shen, J. Phys. D Appl. Phys. 46, 305105 (2013).

    Article  Google Scholar 

  15. B. Qiao, Z. Zhang, X. Xie, B. Li, K. Li, X. Chen, H. Zhao, K. Liu, L. Liu, and D. Shen, J. Phys. Chem. C 123, 18516 (2019).

    Article  CAS  Google Scholar 

  16. N. Matsumura, M. Tsubokura, J. Saraie, and Y. Yodogawa, J. Cryst. Growth 86, 311 (1998).

    Article  Google Scholar 

  17. T. Abe, N. Ikadatsu, R. Inoue, T. Fujimoto, K. Tanaka, A. Tazue, Y. Inagaki, M. Ebisu, H. Kasada, and K. Ando, Phys. Status Sollidi C 11, 1300 (2014).

    Article  CAS  Google Scholar 

  18. R. Inoue, T. Abe, T. Fujimoto, N. Ikadatsu, K. Tanaka, S. Uchida, A. Tazue, H. Kasada, K. Ando, and K. Ichino, Appl. Phys. Express 8, 022101 (2015).

    Article  Google Scholar 

  19. T. Abe, R. Inoue, T. Fujimoto, K. Tanaka, S. Uchida, H. Kasada, K. Ando, and K. Ichino, Phys. Status Solidi C 13, 677 (2016).

    Article  CAS  Google Scholar 

  20. M. Nakano, T. Makino, A. Tsukazaki, K. Ueno, A. Ohtomo, T. Fukumura, H. Yuji, S. Akasaka, K. Tamura, K. Nakahara, T. Tanabe, A. Kamisawa, and M. Kawasaki, Appl. Phys. Lett. 93, 123309 (2008).

    Article  Google Scholar 

  21. J.T. Zettler, K. Stahrenberg, W. Richter, H. Wenisch, B. Jobst, and D. Hommel, J. Vac. Sci. Thechnol. 14, 2757 (1996).

    Article  CAS  Google Scholar 

  22. L. Daweritz and R. Hey, Surf. Sci. 236, 15 (1988).

    Article  Google Scholar 

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Authors and Affiliations

  1. Department of Information and Electronics, Graduate School of Engineering, Tottori University, 4-101 Koyama-Minami, Tottori, 680-8552, Japan

    Yuki Ichikawa, Keita Tanaka, Kazuki Nakagawa, Yuta Fujii, Kentaro Yoshida, Kaiki Nakamura, Ryuichi Miyazaki, Tomoki Abe, Hirofumi Kasada, Kunio Ichino & Kazuaki Akaiwa

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  1. Yuki Ichikawa
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  2. Keita Tanaka
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  3. Kazuki Nakagawa
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  4. Yuta Fujii
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  5. Kentaro Yoshida
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  6. Kaiki Nakamura
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  7. Ryuichi Miyazaki
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  8. Tomoki Abe
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  9. Hirofumi Kasada
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  11. Kazuaki Akaiwa
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Correspondence to Tomoki Abe.

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Ichikawa, Y., Tanaka, K., Nakagawa, K. et al. High-Gain Ultraviolet Avalanche Photodiodes Using a ZnSe-Based Organic–Inorganic Hybrid Structure. J. Electron. Mater. 49, 4589–4593 (2020). https://doi.org/10.1007/s11664-020-07970-w

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  • DOI: https://doi.org/10.1007/s11664-020-07970-w

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