Influence of Molecular Beam Epitaxy (MBE) Parameters on Catalyst-Free Growth of InAs Nanowires on Silicon (111) Substrate

  • Suresh K. Jangir
  • Hitendra K. Malik
  • Anand Kumar
  • D. V. Sridhar Rao
  • R. Muralidharan
  • Puspashree MishraEmail author


The effect of molecular beam epitaxy parameters on catalyst-free growth of InAs nanowires using oxide templates on Si (111) substrate has been studied. Two different approaches, i.e., thermal and plasma-enhanced chemical vapor deposition, were used to prepare the oxide templates. The length, diameter, density, and quality of the nanowires depended strongly on the substrate temperature, As/In beam equivalent pressure ratio, and growth rate, whereas the type, thickness, and uniformity of the oxide were found to affect only the density of the nanowires. Nanowires could be grown effectively in only a very narrow range of these growth parameters. The surface morphological, structural, and optical properties of the nanowires were assessed using various techniques including field-emission scanning electron microscopy, high-resolution x-ray diffraction analysis, transmission electron microscopy, and Raman spectroscopy.


Molecular beam epitaxy nanowires catalyst-free InAs electron microscopy high-resolution x-ray diffraction Raman spectroscopy 


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We would like to thank the Director, SSPL for his encouragement and permission to publish this work.


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© The Minerals, Metals & Materials Society 2019

Authors and Affiliations

  1. 1.Solid State Physics LaboratoryTimarpur, DelhiIndia
  2. 2.Department of PhysicsIndian Institute of Technology, DelhiNew DelhiIndia
  3. 3.Defence Metallurgical Research LaboratoryHyderabadIndia
  4. 4.Center for Nanoscience and EngineeringIndian Institute of ScienceBengaluruIndia

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