Journal of Electronic Materials

, Volume 48, Issue 3, pp 1342–1346 | Cite as

Inductance Evaluation of CPW with Co-Zr-Nb Film Using Magnetic Circuit Analysis

  • Sho MurogaEmail author
  • Yasushi Endo
  • Motoshi Tanaka
5th International Conference of Asian Union of Magnetics Societies
Part of the following topical collections:
  1. 5th International Conference of Asian Union of Magnetics Societies (IcAUMS)


Inductance of an on-chip transmission line with a magnetic film-type noise suppressor is quantitatively evaluated based on magnetic circuit analysis to develop design guidelines. A Co85Zr3Nb12(Co-Zr-Nb) film with uniaxial anisotropy deposited on a coplanar waveguide (CPW) was used as a test bench, and a magnetic circuit model was developed with cross-sectional size and material parameters. The magnetic circuit analysis included the ferromagnetic resonance (FMR) frequency shift caused by an additional demagnetizing field due to the presence of the narrow CPW. The inductance calculated using the reluctance around the signal line was almost the same as measured values. Results of this study indicated that the frequency characteristics of the inductance were mostly affected by the real part of the complex permeability considering the demagnetizing field.


Electromagnetic compatibility noise suppression magnetic film ferromagnetic resonance loss magnetic circuit 


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This work was supported in part by KAKENHI 17H03226 and KAKENHI 17K00090.


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Copyright information

© The Minerals, Metals & Materials Society 2018

Authors and Affiliations

  1. 1.Graduate School of Engineering ScienceAkita UniversityAkitaJapan
  2. 2.Graduate School of EngineeringTohoku UniversitySendaiJapan
  3. 3.Center for Spintronics Research NetworkTohoku UniversitySendaiJapan

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