Journal of Electronic Materials

, Volume 48, Issue 2, pp 887–897 | Cite as

Thermal Annealing Effects on the Electrical and Structural Properties of Ni/Pt Schottky Contacts on the Quaternary AlInGaN Epilayer

  • Engin ArslanEmail author
  • Şemsettin Altındal
  • Sertaç Ural
  • Ömer A. Kayal
  • Mustafa Öztürk
  • Ekmel Özbay


Pt/Au, Ni/Au, Ni/Pt/Au Schottky contacts were placed on a quaternary Al0.84In0.13Ga0.03N epilayer. The electrical and structural properties of the as-deposited Pt/Au, Ni/Au, Ni/Pt/Au and annealed Ni/Pt/Au Schottky contacts were investigated as a function of annealing temperature using current–voltage (I–V), capacitance–voltage (CV), and high resolution x-ray diffraction measurements (HR-XRD). According to the I–V, Norde, and CV methods, the highest Schottky barrier height (SBH) was obtained for the Pt/Au (0.82 eV (I–V), 0.83 eV (Norde), and 1.09 eV (CV)) contacts when they were compared with the other as-deposited Schottky contacts. The estimated SBH of the annealed Ni/Pt/Au Schottky contacts, calculated from the I–V results, were 0.80 eV, 0.79 eV, and 0.78 eV at 300°C, 400°C, and 500°C, respectively. The SBH decreases with an increase in the annealing temperature up to 500°C compared with that of the as-deposited Ni/Pt/Au Schottky contact. The observed extra peaks in the annealed samples confirm the formation of a new interfacial phase at the interface. However, the diffraction patterns of the annealed Schottky contacts did not change as a function of the annealing temperature. The higher ideality factors values were obtained for as-deposited Pt/Au (5.69), Ni/Au (6.09), and Ni/Pt/Au (6.42) Schottky contacts and annealed Ni/Pt/Au (6.42) Schottky contacts at 300°C (6.89), 400°C (7.43), and 500°C (8.04). The higher n results can be attributed to current-transport mechanisms other than thermionic emission, such as dislocation related tunneling.


B1. AlInGaN A1. Schottky A3. metalorganic chemical vapor deposition (MOCVD) annealing effects 


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Copyright information

© The Minerals, Metals & Materials Society 2018

Authors and Affiliations

  • Engin Arslan
    • 1
    • 2
    Email author
  • Şemsettin Altındal
    • 3
  • Sertaç Ural
    • 2
  • Ömer A. Kayal
    • 2
  • Mustafa Öztürk
    • 2
  • Ekmel Özbay
    • 2
    • 4
  1. 1.Department of Electrical and Electronics EngineeringAntalya Bilim UniversityAntalyaTurkey
  2. 2.Nanotechnology Research Center-NANOTAMBilkent UniversityAnkaraTurkey
  3. 3.Department of Physics, Faculty of Science and ArtsGazi UniversityAnkaraTurkey
  4. 4.Department of Physics, Department of Electrical and Electronics EngineeringBilkent UniversityAnkaraTurkey

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