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Journal of Electronic Materials

, Volume 48, Issue 1, pp 72–78 | Cite as

Room Temperature Bonding on Interface Between Metal and Ceramic

  • Kyu-Bong Jang
  • Sungwook MhinEmail author
  • Sung-Chul Lim
  • Young-Sik Song
  • Keun-Hyo Lee
  • Soo-Keun Park
  • Kyoung-Il Moon
  • Seung Hwan Lee
  • Soong-Keun Hyun
TMS2018 Microelectronic Packaging, Interconnect, and Pb-free Solder
Part of the following topical collections:
  1. TMS2018 Advanced Microelectronic Packaging, Emerging Interconnection Technology, and Pb-free Solder

Abstract

The influence of surface activated bonding (SAB) on adhesion strength between a metal and ceramic including Al/AlN and Cu/AlN is investigated. Plasma pre-treatments can significantly increase the adhesion strength between the metal and ceramic through surface activation, which can enlarge the contact area between metal and ceramic. Bonding pressure is also an important factor to improve the adhesion between metal and ceramic during SAB. Successful bonding between the metal and ceramic via SAB can be attributed to the formation of the interface layer where plastic deformation and rearrangement of metal to the ceramic occurs, which improves the atomic scale interconnection between the metal and ceramic. In this study, the influence of experimental SAB conditions for processing such as plasma power, degree of vacuum and bonding pressure on adhesion strength is investigated. Also, the thermal conduction of metal/ceramic laminates is discussed for its potential application as a heat spreader of LED chips.

Keywords

Surface activated bonding plasma pre-treatment adhesion strength processing conditions 

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Copyright information

© The Minerals, Metals & Materials Society 2018

Authors and Affiliations

  • Kyu-Bong Jang
    • 1
    • 2
  • Sungwook Mhin
    • 2
    Email author return OK on get
  • Sung-Chul Lim
    • 2
  • Young-Sik Song
    • 2
  • Keun-Hyo Lee
    • 2
  • Soo-Keun Park
    • 2
  • Kyoung-Il Moon
    • 2
  • Seung Hwan Lee
    • 3
  • Soong-Keun Hyun
    • 1
  1. 1.School of Materials Science and EngineeringInha UniversityIncheonKorea
  2. 2.Korea Institute of Industrial TechnologySiheung-siKorea
  3. 3.School of Aerospace and Mechanical EngineeringKorea Aerospace UniversityGoyangsiKorea

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