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Comparative Study of Cu Films Prepared by DC, High-Power Pulsed and Burst Magnetron Sputtering

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Abstract

A comparative study of deposition rate, adhesion, structural and electrical properties of nanocrystalline copper thin films deposited using direct current magnetron sputtering (DCMS) and different regimes of high power pulsed magnetron sputtering is presented. High-power impulse magnetron sputtering (HIPIMS) and burst regime (pulse packages) of magnetron sputtering are investigated. The ion and atomic flows toward the growing film during magnetron sputtering of a Cu target are determined. X-ray diffraction, scanning electron microscopy and atomic force microscopy were used to observe the structural characterization of the films. The resistivity of the films was measured using four-point probe technique. In all sputtering regimes, Cu films have mixture crystalline orientations of [111], [200], [311] and [220] in the direction of the film growth. As peak power density in studied deposition regimes was different in order of magnitude (from 15 W/cm2 in DC regime to 3700 W/cm2 in HIPIMS), film properties were also greatly different. DCMS Cu films exhibit a porous columnar grain structure. In contrast, HIPIMS Cu films have a slightly columnar and denser composition. Cu films deposited using burst regimes at peak power density of 415 W cm−2 and ion-to-atom ratio of about 5 have the densest composition and smallest electrical resistance.

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Authors and Affiliations

  1. Department of Experimental Physics, Tomsk Polytechnic University, 30 Lenina Ave., Tomsk, 634050, Russia

    A. A. Solovyev

  2. Laboratory of Applied Electronics, Institute of High Current Electronics, 2/3 Akademichesky Ave., Tomsk, 634055, Russia

    V. O. Oskirko, V. A. Semenov, K. V. Oskomov & S. V. Rabotkin

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  1. A. A. Solovyev
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  2. V. O. Oskirko
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  3. V. A. Semenov
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  4. K. V. Oskomov
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  5. S. V. Rabotkin
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Correspondence to A. A. Solovyev.

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Solovyev, A.A., Oskirko, V.O., Semenov, V.A. et al. Comparative Study of Cu Films Prepared by DC, High-Power Pulsed and Burst Magnetron Sputtering. J. Electron. Mater. 45, 4052–4060 (2016). https://doi.org/10.1007/s11664-016-4582-6

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  • DOI: https://doi.org/10.1007/s11664-016-4582-6

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