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Journal of Electronic Materials

, Volume 44, Issue 10, pp 3654–3660 | Cite as

Evaluation of Dielectric Properties of HTCC Alumina for Realization of Plasma Sources

  • Martin Berglund
  • Anders Persson
  • Greger Thornell
Article

Abstract

As the sensitivity of optogalvanic spectroscopy based on prototype microplasma sources increases, contamination from composite materials in the printed circuit board used starts to become a concern. In this paper, a transfer to high-temperature cofired alumina and platinum is made and evaluated. The high-purity alumina provides an inert plasma environment, and allows for temperatures above 1000°C, which is beneficial for future integration of a combustor. To facilitate the design of high-end plasma sources, characterization of the radio frequency (RF) parameters of the materials around 2.6 GHz is carried out. A RF resonator structure was fabricated in both microstrip and stripline configurations. These resonators were geometrically and electrically characterized, and ε r and tan \({\delta}\) were calculated using the RF waveguide design tool Wcalc. The resulting ε r for the microstrip and stripline was found to be 10.68 (±0.12) and 9.65 (±0.14), respectively. The average tan \({\delta}\) of all devices was found to be 0.0011 (±0.0007). With these parameters, a series of proof-of-concept plasma sources were fabricated and evaluated. Some problems in the fabrication stemmed from the lamination and difficulties with the screen-printing, but a functioning plasma source was demonstrated.

Keywords

HTCC dielectric characterization radio frequency alumina microplasma plasma source 

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Notes

Acknowledgements

The authors would like to thank the Swedish National Space Board (SNSB) for funding this project. The Knut and Alice Wallenberg Foundation is acknowledged for funding additional laboratory facilities. All contributions from Zahra Khaji, Lena Klintberg, and Peter Sturesson at the Division of Micro Systems Technology Uppsala University, are also greatly appreciated. Karin Berglund is acknowledged for helping with illustrations.

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Copyright information

© The Minerals, Metals & Materials Society 2015

Authors and Affiliations

  1. 1.Ångström Space Technology Centre, Department of Engineering SciencesUppsala UniversityUppsalaSweden

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