Journal of Electronic Materials

, Volume 43, Issue 10, pp 3870–3875 | Cite as

Monte Carlo Simulations of Thermal Conductivity in Nanoporous Si Membranes

  • Stefanie WolfEmail author
  • Neophytos Neophytou
  • Zlatan Stanojevic
  • Hans Kosina


We present a Monte Carlo study of heat transport in Si nanomeshes. Phonons are treated semiclassically as particles of specific energy and velocity that undergo phonon–phonon scattering and boundary scattering on the surfaces of the nanomesh pores. We investigate the influence of: (1) geometric parameters such as the pore arrangement/randomness and porosity, and (2) the roughness amplitude of the pore surfaces on the thermal conductivity of the nanomeshes. We show that the nanomesh porosity has a strong detrimental influence on the thermal conductivity. Boundary roughness still degrades the thermal conductivity, but its influence is smaller.


Phonon Boltzmann transport equation Monte Carlo nanoporous silicon nanomesh thermoelectrics 


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This work has been supported by the Austrian Science Fund (FWF) contract P25368-N30. The authors acknowledge helpful discussions with Dr.␣Hossein Karamitaheri.


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Copyright information

© The Minerals, Metals & Materials Society 2014

Authors and Affiliations

  • Stefanie Wolf
    • 1
    Email author
  • Neophytos Neophytou
    • 1
    • 2
  • Zlatan Stanojevic
    • 1
  • Hans Kosina
    • 1
  1. 1.Institute for MicroelectronicsTechnical University of ViennaViennaAustria
  2. 2.School of EngineeringUniversity of WarwickCoventryUK

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