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Journal of Electronic Materials

, Volume 39, Issue 9, pp 1627–1633 | Cite as

The Role of Au in the Thermoelectric Properties of Amorphous Ge/Au and Si/Au Thin Films

  • H. Takiguchi
  • Z. Yoshikawa
  • H. Miyazaki
  • Y. Okamoto
  • J. Morimoto
Article

Amorphous Si-Ge-Au thin films exhibit high thermoelectric power. To understand the role of Au in the thermoelectric properties, we studied the structural and thermoelectric properties of Si/Au and Ge/Au thin films. Samples were prepared by electron beam evaporation. Au was found to have two important roles. One is as a carrier source. Therefore, Au composition influences thermoelectric properties. The other role is that Au causes the crystallization of Si and Ge at lower temperature. The grain size ranged from ten to a few tens of nanometers. We conclude that the fine structure is important for high thermoelectric performance.

Keywords

Thermoelectric SiGe amorphous thin film 

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Notes

Acknowledgements

We would like to thank Dr. M. Aono of the National Defense Academy for the SEM measurements. We are grateful to Associate Professor H. Nakatsugawa of Yokohama National University for Hall measurements.

References

  1. 1.
    L.D. Hicks and M.S. Dresselhaus, Phys. Rev. B 47, 12727 (1993).CrossRefADSGoogle Scholar
  2. 2.
    L.D. Hicks and M.S. Dresselhaus, Phys. Rev. B 47, 16631 (1993).CrossRefADSGoogle Scholar
  3. 3.
    Y. Okamoto, H. Uchino, T. Kawahara, and J. Morimoto, Jpn. J. Appl. Phys. 38, L945 (1999).CrossRefADSGoogle Scholar
  4. 4.
    H. Uchino, Y. Okamoto, T. Kawahara, and J. Morimoto, Jpn. J. Appl. Phys. 39, 1675 (2000).CrossRefADSGoogle Scholar
  5. 5.
    K. Fukui, M. Nakamori, Y, Okamoto, and J. Morimoto, Proceedings from the 23rd International Conference on Thermoelectrics (2005), p. 172.Google Scholar
  6. 6.
    Y. Okamoto, H. Fujita, T. Kawahara, S.M. Lee, and J. Morimoto, Proceedings from the 18th International Conference on Thermoelectrics (2000), p. 435.Google Scholar
  7. 7.
    H. Takiguchi, Y. Okamoto, H. Miyazaki, and J. Morimoto, Jpn. J. Appl. Phys. 47, 3980 (2008).CrossRefADSGoogle Scholar
  8. 8.
    T.B. Massalski, Binary Alloy Phase Diagrams (Ohio: American Society for Metals, 1987), p. 313.Google Scholar
  9. 9.
    F. Oki, Y. Ogawa, and Y. Fujiki, Jpn. J. Appl. Phys. 8, 1056 (1969).CrossRefADSGoogle Scholar
  10. 10.
    G. Radnoczi, A. Robertsson, H.T.G. Hentzell, S.F. Gong, and M.-A. Hasan, J. Appl. Phys. 69, 6394 (1991).CrossRefADSGoogle Scholar
  11. 11.
    Z. Tan and S.M. Heald, Phys. Rev. B 46, 9505 (1992).CrossRefADSGoogle Scholar
  12. 12.
    J.H. Choi, D.Y. Kim, S.S. Kim, S.J. Park, and J. Jang, Thin Solid Films 440, 1 (2003).CrossRefADSGoogle Scholar
  13. 13.
    Y. Sasaki, Y. Nishida, R. Akihama, Y. Okamoto, and A. Nukui, Proceedings of the MRS International Conference on Advanced Materials (1989), p. 563.Google Scholar
  14. 14.
    T.B. Massalski, Binary Alloy Phase Diagrams (Ohio: American Society for Metals, 1987), p. 264.Google Scholar
  15. 15.
    S.F. Gong, H.T. Hentzell, A.E. Robertsson, L. Hultman, S.-E. Hornstrom, and G. Radnoczi, J. Appl. Phys. 62, 3726 (1987).CrossRefADSGoogle Scholar
  16. 16.
    D.R. Lide, Handbook of Chemistry and Physics (Boca Raton: CRC, 2001), pp. 12–108.Google Scholar
  17. 17.
    T. Kaneko, M. Wakagi, K. Onisaza, and T. Minemura, Appl. Phys. Lett. 64, 1865 (1994).CrossRefADSGoogle Scholar
  18. 18.
    Y. Yashiki, S. Kouketsu, S. Miyajima, A. Yamada, and M. Konagai, J. Non-Cryst. Solid 354, 2355 (2008).CrossRefADSGoogle Scholar
  19. 19.
    M. Hamabe, H. Takahashi, S. Yamaguchi, T. Komine, T. Eura, H. Okumura, Y. Okamoto, and J. Morimoto, Jpn. J. Appl. Phys. 42, 6779 (2003).CrossRefADSGoogle Scholar

Copyright information

© TMS 2010

Authors and Affiliations

  • H. Takiguchi
    • 1
  • Z. Yoshikawa
    • 1
  • H. Miyazaki
    • 1
  • Y. Okamoto
    • 1
  • J. Morimoto
    • 1
  1. 1.Department of Materials Science and EngineeringNational Defense AcademyYokosukaJapan

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