Journal of Electronic Materials

, Volume 39, Issue 5, pp 517–525

Spatial Localization of Carrier Traps in 4H-SiC MOSFET Devices Using Thermally Stimulated Current

  • Marko J. Tadjer
  • Robert E. Stahlbush
  • Karl D. Hobart
  • Patrick J. McMarr
  • Hap L. Hughes
  • Eugene A. Imhoff
  • Fritz J. Kub
  • Sarah K. Haney
  • Anant Agarwal
Open Access
Article

Abstract

Carrier traps in 4H-SiC metal–oxide–semiconductor (MOS) capacitor and transistor devices were studied using the thermally stimulated current (TSC) method. TSC spectra from p-type MOS capacitors and n-channel MOS field-effect transistors (MOSFETs) indicated the presence of oxide traps with peak emission around 55 K. An additional peak near 80 K was observed due to acceptor activation and hole traps near the interface. The physical location of the traps in the devices was deduced using a localized electric field approach. The density of hole traps contributing to the 80-K peak was separated from the acceptor trap density using a gamma-ray irradiation method. As a result, hole trap density of Nt,hole = 2.08 × 1015 cm−3 at 2 MV/cm gate field and Nt,hole = 2.5 × 1016 cm−3 at 4.5 MV/cm gate field was extracted from the 80-K TSC spectra. Measurements of the source-body n+p junction suggested the presence of implantation damage in the space-charge region, as well as defect states near the n+ SiC substrate.

Keywords

Thermally stimulated current hole traps 4H-SiC MOSCAP 4H-SiC MOSFET threshold voltage implantation damage acceptor activation 

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Copyright information

© United States Naval Research Laboratory 2010

Authors and Affiliations

  • Marko J. Tadjer
    • 1
  • Robert E. Stahlbush
    • 2
  • Karl D. Hobart
    • 2
  • Patrick J. McMarr
    • 2
  • Hap L. Hughes
    • 2
  • Eugene A. Imhoff
    • 2
  • Fritz J. Kub
    • 2
  • Sarah K. Haney
    • 3
  • Anant Agarwal
    • 3
  1. 1.University of MarylandCollege ParkUSA
  2. 2.Naval Research LaboratoryWashingtonUSA
  3. 3.Cree, Inc.DurhamUSA

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