Journal of Electronic Materials

, Volume 37, Issue 10, pp 1547–1551 | Cite as

Interface Engineering and Direct Bonding of Lithium Tantalate Crystals

Open Access
Article

A method for modifying the surface free energy of lithium tantalate (LT) ferroelectric crystals is reported. Ultraviolet illumination and low-energy electron irradiation have been used for tuning the surface free energy (wettability) resulting in a wide range of contact angles (6 deg to 87 deg). The ultraviolet (UV) illumination makes the LT crystal surface superhydrophilic while the low-energy electron irradiation decreases the surface wetting. Fabrication of various wetting configurations allows demonstration of high-quality direct bonding of LT plates with hydrophilic polar faces.

Keywords

Direct bonding ferroelectrics LiTaO3 surface free energy 

Notes

Acknowledgement

This work was supported by the Israel Science Foundation (Grant No. 960/05).

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Copyright information

© TMS 2008

Authors and Affiliations

  1. 1.Department of Physical ElectronicsSchool of Electrical Engineering, Tel Aviv UniversityTel AvivIsrael

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