Journal of Electronic Materials

, Volume 36, Issue 10, pp 1320–1325

Neutron Radiation Effects in Epitaxially Laterally Overgrown GaN Films

  • A. Y. Polyakov
  • N. B. Smirnov
  • A. V. Govorkov
  • A. V. Markov
  • E. B. Yakimov
  • P. S. Vergeles
  • N. G. Kolin
  • D. I. Merkurisov
  • V. M. Boiko
  • In-Hwan Lee
  • Cheul-Ro Lee
  • S. J. Pearton
Open Access
Article

Neutron radiation effects were studied in undoped n-GaN films grown by epitaxial lateral overgrowth (ELOG). The irradiation leads to carrier removal and introduces deep electron traps with activation energy 0.8 eV and 1 eV. After the application of doses exceeding 1017 cm−2, the material becomes semi-insulating n-type, with the Fermi level pinned near the level of the deeper electron trap. These features are similar to those previously observed for neutron irradiated undoped n-GaN prepared by standard metal–organic chemical vapor deposition (MOCVD). However, the average carrier removal rate and the deep center introduction rate in ELOG samples is about five-times lower than in MOCVD samples. Studies of electron beam induced current (EBIC) show that the changes in the concentration of charged centers are a minimum in the low-dislocation-density laterally overgrown regions and radiation-induced damage propagates inside these laterally overgrown areas from their boundary with the high-dislocation-density GaN in the windows of the ELOG mask.

Key words

GaN ELOG neutron irradiation 

Copyright information

© TMS 2007

Authors and Affiliations

  • A. Y. Polyakov
    • 1
  • N. B. Smirnov
    • 1
  • A. V. Govorkov
    • 1
  • A. V. Markov
    • 1
  • E. B. Yakimov
    • 2
  • P. S. Vergeles
    • 2
  • N. G. Kolin
    • 3
  • D. I. Merkurisov
    • 3
  • V. M. Boiko
    • 3
  • In-Hwan Lee
    • 4
  • Cheul-Ro Lee
    • 4
  • S. J. Pearton
    • 5
  1. 1.Institute of Rare MetalsMoscowRussia
  2. 2.Institute of Microelectronics Technology RASChernogolovkaRussia
  3. 3.Obninsk Branch of Federal State Unitary EnterpriseKarpov Institute of Physical ChemistryObninskRussia
  4. 4.School of Advanced Materials Engineering and Research Center for Advanced Materials Development, Engineering CollegeChonbuk National UniversityChonjuKorea
  5. 5.Department of Materials Science EngineeringUniversity of FloridaGainesvilleUSA

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