Journal of Electronic Materials

, Volume 33, Issue 8, pp 846–850 | Cite as

Normal-incidence mid-infrared Ge quantum-dot photodetector

  • Fei Liu
  • Song Tong
  • Jianlin Liu
  • Kang L. Wang
Regular Issue Paper


Mid-infrared photodetectors were demonstrated by using molecular-beam epitaxy (MBE)-grown self-assembled Ge quantum dots (QDs). The response wavelength ranged from 2.2 µm to 3.1 µm and peaked at 2.8 µm. The peak response wavelengths shifted to 2.9 µm and 3.5 µm after thermal annealing at 700°C and 900°C for 5 min, respectively. Normal-incidence detection was confirmed, and the mechanism of a Ge QD photodetector was discussed. Calculations showed the key parameters determining response wavelength of the Ge QD infrared photodetector, which agreed with experimental results.

Key words

Ge quantum dot (QD) mid-infrared photodetector annealing 


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Copyright information

© TMS-The Minerals, Metals and Materials Society 2004

Authors and Affiliations

  • Fei Liu
    • 1
  • Song Tong
    • 1
  • Jianlin Liu
    • 2
  • Kang L. Wang
    • 1
  1. 1.Device Research Laboratory, Department of Electrical EngineeringUniversity of California at Los AngelesLos Angeles
  2. 2.Department of Electrical EngineeringUniversity of California at RiversideRiverside

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