Advertisement

Metallurgical and Materials Transactions B

, Volume 27, Issue 6, pp 1057–1060 | Cite as

Characterization of titanium thin films prepared by bias assisted magnetron sputtering

  • H. S. Vijaya
  • G. Mohan Rao
  • S. Mohan
  • G. K. Muralidhar
  • G. N. Subbanna
Communications

Keywords

Material Transaction Bias Voltage Sheet Resistance Negative Bias Voltage Titanium Thin Film 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    J. Kong, H. Shen, B. Chen, Z. Li, W. Shi, W. Yao, and Zh. Qi: Thin Solid Films, 1992, vol. 207, pp. 51–53.CrossRefGoogle Scholar
  2. 2.
    H. Ljungcrantz, L. Hultman, and J.E. Sundgren: J. Vac. Sci. Technol. A, 1993, vol. 11, pp. 543–53.CrossRefADSGoogle Scholar
  3. 3.
    F.A. Smidt: Int. Mater. Rev., 1990, vol. 35, pp. 61–128.Google Scholar
  4. 4.
    B.D. Cullity: Elements of X-Ray Diffraction, Addison-Wesley Publishing Company, London, 1967, pp. 444–53.Google Scholar
  5. 5.
    W.D. Westwood: Progr. Surface Sci., 1976, vol. 7, pp. 71–111.CrossRefGoogle Scholar
  6. 6.
    P.R. Stuart: Vacuum, 1969, vol. 19, pp. 507–11.CrossRefGoogle Scholar
  7. 7.
    J.A. Thornton: J. Vac. Sci. Techol., 1974, vol. 11, pp. 666–69.CrossRefGoogle Scholar
  8. 8.
    D. Hoffmann and J. Thornton: Thin Solid Films, 1977, vol. 40, pp. 355–63.CrossRefGoogle Scholar
  9. 9.
    V. Valvoda, A.J. Perry, L. Hultman, J. Mucil, and S. Kadlec: Surf. Coat. Technol., 1991, vol. 49, pp. 181–85.CrossRefGoogle Scholar
  10. 10.
    D.W. Hoffman and J.A. Thornton: J. Vac. Sci. Technol., 1982, vol. 20, pp. 355–58.CrossRefGoogle Scholar
  11. 11.
    M. Ohring: The Materials Science of Thin Films, Academic Press, New York, NY, 1992, pp. 427–29.Google Scholar
  12. 12.
    D.M. Mattox: J. Vac. Sci. Technol. A, 1989, vol. 7, pp. 1105–14.CrossRefADSGoogle Scholar
  13. 13.
    J.A. Thornton and D.W. Hoffman: J. Vac. Sci. Technol., 1977, vol. 14, pp. 164–68.CrossRefGoogle Scholar
  14. 14.
    J.A. Thornton: Ann. Rev. Mater. Sci., 1977, vol. 7, pp. 239–60.CrossRefGoogle Scholar
  15. 15.
    A.F. Jankowski and Mark A. Wall: J. Mater. Res., 1994, vol. 9, pp. 31–38.ADSGoogle Scholar
  16. 16.
    Satish Vitta, A.L. Greer, and R.E. Somekh: Mater. Sci. Eng., 1988, vol. 98, pp. 105–09.CrossRefGoogle Scholar

Copyright information

© ASM International & TMS-The Minerals, Metals and Materials Society 1996

Authors and Affiliations

  • H. S. Vijaya
    • 1
  • G. Mohan Rao
    • 1
  • S. Mohan
    • 1
  • G. K. Muralidhar
    • 2
  • G. N. Subbanna
    • 3
  1. 1.the Department of InstrumentationIndian Institute of ScienceBangaloreIndia
  2. 2.Royal Melbourne Institute of TechnologyMelbourneAustralia
  3. 3.the Materials Research CentreIndian Institute of ScienceBangaloreIndia

Personalised recommendations