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Application of Plasma FIB to Analyze a Single Oxide Inclusion in Steel

Abstract

We demonstrate that Plasma Dual Beam focused ion beam (PFIB) milling can be used for high-resolution three-dimensional chemical study of a single non-metallic inclusion in steel. A CaO-Al2O3-MgO inclusion (~ 10 μm) on a polished cross-section of steel sample was located and milled using a Xe+ ion beam. A secondary electron image and EDS map of every section were recorded and subsequently processed to show the 3D chemistry and morphology of the inclusion.

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The authors are grateful to the industrial members of the Center of Iron and Steelmaking Research for financial support and suggestions. The authors acknowledge the use of Materials Characterization Facility at Carnegie Mellon University supported by Grant MCF-677785.

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Correspondence to Petrus Christiaan Pistorius.

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Manuscript submitted December 19, 2018.

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Supplementary material 1 (MP4 19258 kb)

Supplementary material 2 (MP4 4116 kb)

Supplementary material 3 (MP4 11899 kb)

Supplementary material 4 (MP4 12784 kb)

Supplementary material 5 (MP4 7076 kb)

Supplementary material 6 (MP4 3428 kb)

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Kumar, D., Nuhfer, N.T., Ferreira, M.E. et al. Application of Plasma FIB to Analyze a Single Oxide Inclusion in Steel. Metall and Materi Trans B 50, 1124–1127 (2019) doi:10.1007/s11663-019-01555-7

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