Plasmonics

, Volume 7, Issue 4, pp 695–699 | Cite as

A CMOS Image Sensor Integrated with Plasmonic Colour Filters

  • Q. Chen
  • D. Das
  • D. Chitnis
  • K. Walls
  • T. D. Drysdale
  • S. Collins
  • D. R. S. Cumming
Article

Abstract

Multi-pixel, 4.5 × 9 μm, plasmonic colour filters, consisting of periodic subwavelength holes in an aluminium film, were directly integrated on the top surface of a complementary metal oxide semiconductor (CMOS) image sensor (CIS) using electron beam lithography and dry etch. The 100 × 100-pixel plasmonic CIS showed full colour sensitivities across the visible range determined by a photocurrent measurement. The filters were fabricated in a simple process utilising a single lithography step. This is to be compared with the traditional multi-step processing when using dye-doped polymers. The intrinsic compatibility of these plasmonic components with a standard CMOS process allows them to be manufactured in a metal layer close to the photodiodes. The incorporation of such plasmonic components may in the future enable the development of advanced CIS with low cost, low cross-talk and increased functionality.

Keywords

CMOS image sensors Colour filters Surface plasmons Subwavelength structures 

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Copyright information

© Springer Science+Business Media, LLC 2012

Authors and Affiliations

  • Q. Chen
    • 1
  • D. Das
    • 2
  • D. Chitnis
    • 2
  • K. Walls
    • 1
  • T. D. Drysdale
    • 1
  • S. Collins
    • 2
  • D. R. S. Cumming
    • 1
  1. 1.School of EngineeringUniversity of GlasgowGlasgowUK
  2. 2.Department of Engineering ScienceUniversity of OxfordOxfordUK

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