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Frontiers of Mechanical Engineering

, Volume 12, Issue 1, pp 18–32 | Cite as

Recent advances in micro- and nano-machining technologies

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Abstract

Device miniaturization is an emerging advanced technology in the 21st century. The miniaturization of devices in different fields requires production of micro- and nano-scale components. The features of these components range from the sub-micron to a few hundred microns with high tolerance to many engineering materials. These fields mainly include optics, electronics, medicine, bio-technology, communications, and avionics. This paper reviewed the recent advances in micro- and nano-machining technologies, including micro-cutting, micro-electrical-discharge machining, laser micro-machining, and focused ion beam machining. The four machining technologies were also compared in terms of machining efficiency, workpiece materials being machined, minimum feature size, maximum aspect ratio, and surface finish.

Keywords

micro machining cutting electro discharge machining (EDM) laser machining focused ion beam (FIB) 
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Notes

Acknowledgements

SG was sponsored by the Chinese Scholarship Council (CSC) under postdoctoral fellow program. HH would like to acknowledge the financial sponsorship from Australia Research Council (ARC) under Future Fellowship program.

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© The Author(s) 2017

Open Access This article is distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made.

Authors and Affiliations

  1. 1.School of Mechanical and Mining EngineeringThe University of QueenslandQLDAustralia
  2. 2.Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of EducationDalian University of TechnologyDalianChina

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