Chemical vapor deposition synthesis of two-dimensional freestanding transition metal oxychloride for electronic applications

  • Shengnan Yan
  • Pengfei Wang
  • Chen-Yu Wang
  • Tao Xu
  • Zhuan Li
  • Tianjun Cao
  • Moyu Chen
  • Chen Pan
  • Bin Cheng
  • Litao Sun
  • Shi-Jun LiangEmail author
  • Feng MiaoEmail author
Research Paper


Two-dimensional transition metal oxychlorides (MOCl, M = Fe, Cr, V, Ti, Sc) with the metal-oxygen plane sandwiched by two layers of chloride ions possess many exotic physical properties. Nevertheless, it is of great challenge to grow two-dimensional single-crystal MOCl because polyvalent nature of transition metal elements usually gives rise to mixed oxyhalides compounds with distinct physical properties. Here, we take VOCl as an example to present a solution for synthesizing 2D freestanding MOCl with various thicknesses through chemical vapor deposition (CVD) method. The single crystal and elementary composition as well as elements ratio of as-grown samples have been characterized through measurements of X-ray diffraction, X-ray photoelectron spectroscopy and energy-dispersive spectroscopy, respectively. Furthermore, we demonstrate that 2D VOCl-based memristive devices show low power consumption and excellent device reliability due to the layered-structure and electrically insulating properties of 2D VOCl flakes. Besides, we utilize the feature of multilevel resistive switching that memristive devices exhibit to emulate depression and potentiation of synaptic plasticity. This method developed in this study may open up a new avenue for the growth of 2D MOCl with single crystal and pave the way for high-performance electronic applications.


transition metal oxychlorides chemical vapor deposition freestanding memristive device neuromorphic computing 



This work was supported in part by National Key Basic Research Program of China (Grant No. 2015CB921600), National Natural Science Foundation of China (Grant Nos. 61974176, 61574076), Collaborative Innovation Center of Advanced Microstructures, Natural Science Foundation of Jiangsu Province (Grant Nos. BK20180330, BK20150055), and Fundamental Research Funds for the Central Universities (Grant Nos. 020414380122, 020414380084).

Supplementary material

11432_2019_2653_MOESM1_ESM.pdf (980 kb)
Chemical Vapor Deposition Synthesis of Two-dimensional Freestanding Transition Metal Oxychloride for Electronic Applications


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Copyright information

© Science China Press and Springer-Verlag GmbH Germany, part of Springer Nature 2019

Authors and Affiliations

  • Shengnan Yan
    • 1
  • Pengfei Wang
    • 1
  • Chen-Yu Wang
    • 1
  • Tao Xu
    • 2
  • Zhuan Li
    • 1
  • Tianjun Cao
    • 1
  • Moyu Chen
    • 1
  • Chen Pan
    • 1
  • Bin Cheng
    • 1
  • Litao Sun
    • 2
  • Shi-Jun Liang
    • 1
    Email author
  • Feng Miao
    • 1
    Email author
  1. 1.National Laboratory of Solid State Microstructures, School of Physics, Collaborative Innovation Center of Advanced MicrostructuresNanjing UniversityNanjingChina
  2. 2.Key Laboratory of MEMS of Ministry of EducationSoutheast UniversityNanjingChina

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