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Kalman filtering-based supervisory run-to-run control method for semiconductor diffusion processes

  • Zhao Xu
  • Changhua HuEmail author
  • Jinwen Hu
Letter
  • 7 Downloads

Notes

Acknowledgements

This work was supported by National Natural Science Foundation of China (Grant Nos. 61603303, 61803309, 61573365, 61833016), Natural Science Basic Research Program of Shaanxi (Grant No. 2017JQ6005), Fundamental Research Funds for the Central Universities (Grant No. G2017KY0008), and Innovation Development Foundation of Loving Students (Grant No. ASNIF2015-1502).

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Copyright information

© Science China Press and Springer-Verlag GmbH Germany, part of Springer Nature 2019

Authors and Affiliations

  1. 1.School of Electronics and InformationNorthwestern Polytechnical UniversityXi’anChina
  2. 2.Xi’an Research Institute of High-TechnologyXi’anChina
  3. 3.School of AutomationNorthwestern Polytechnical UniversityXi’anChina

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