Science China Technological Sciences

, Volume 58, Issue 2, pp 346–351 | Cite as

A novel linear microprobe array for the fabrication of neural microelectrodes

  • ShanShan Zhao
  • WeiHua Pei
  • Hui Zhao
  • YiJun Wang
  • SanYuan Chen
  • YuanFang Chen
  • He Zhang
  • DongMei Guo
  • Qiang Gui
  • HongDa Chen
Article
First Online:
Received:
Accepted:

Abstract

A novel linear microprobe array (LMPA) has been developed by a conventional microfabrication method from silicon. The LMPA leverages the properties of conventional microwire with additional features of naturally formed regular spacing. With the help of periodic microprobe arrays and double-side V-grooves fabricated in advance between each pair of the two microprobes’ rear ends, the number of microprobe units for assembly in one array can be flexibly chosen by cleavage fracture from the LMPA. The fabrication method was demonstrated and the prototype device was assessed by electrochemical impedance spectroscopy (EIS) and in vivo test. The SNR of the spikes recorded was 6.

Keywords

LMPA regular spacing cleavage fracture V-groove 
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Copyright information

© Science China Press and Springer-Verlag Berlin Heidelberg 2014

Authors and Affiliations

  • ShanShan Zhao
    • 1
  • WeiHua Pei
    • 1
  • Hui Zhao
    • 1
  • YiJun Wang
    • 2
  • SanYuan Chen
    • 1
  • YuanFang Chen
    • 1
  • He Zhang
    • 1
  • DongMei Guo
    • 1
  • Qiang Gui
    • 1
  • HongDa Chen
    • 1
  1. 1.State Key Laboratory on Integrated Optoelectronics, Institute of SemiconductorsChinese Academy of SciencesBeijingChina
  2. 2.Institute for Neural ComputationUniversity of California San DiegoSan DiegoUSA

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