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Journal of Systems Science and Complexity

, Volume 32, Issue 5, pp 1340–1357 | Cite as

Simulation and Experiment Based on FSMLC Method with EUPI Hysteresis Compensation for a Piezo-Driven Micro Position Stage

  • Jinhai Gao
  • Lina HaoEmail author
  • Hongtai Cheng
  • Ruimin Cao
  • Zhiyong Sun
Article
  • 75 Downloads

Abstract

Micro/nano positioning technologies have been attractive for decades in industrial and scientific applications fields. The actuators have inherent hysteresis that can cause system unexpected behave in some extend. In this research, the authors used extented unparallel Prandtl-Ishlinshii (EUPI) models to represent the input-output relationship of a piezo-driven micro position stage. Integral inverse (I-I) compensator is used for compensating the hysteresis characteristics of the micro positioning stage and compared with direct inverse (D-I) compensator and inverse model (I-M) compensator. However, the accuracy and the robustness of the I-I compensator are worse when there is noisy in the system, a novel sliding-mode-like-control with EUPI (SMLC-EUPI) method was proposed and analyzed by different trajectory tracking experiments in Matlab environment. Though the above strategies can alleviate most deviation, the adjustment of the SMLC’s parameters is very complex. So the fuzzy method is used to adjust these parameters and be verified by trajectory tracking experiments. Finally, for validating the proposed control method, the paper did the corresponding experiment in microscope with CMOS and obtained convincing results.

Keywords

EUPI fuzzy hysteresis compensation micro position stage sliding-mode-like-control 

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Copyright information

© The Editorial Office of JSSC & Springer-Verlag GmbH Germany 2019

Authors and Affiliations

  • Jinhai Gao
    • 1
  • Lina Hao
    • 1
    Email author
  • Hongtai Cheng
    • 1
  • Ruimin Cao
    • 1
  • Zhiyong Sun
    • 2
  1. 1.School of Mechanical Engineering & AutomationNortheastern UniversityShenyangChina
  2. 2.Department of Industrial and Manufacturing Systems EngineeringThe University of Hong KongHong KongChina

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