In this paper, chemical mechanical polishing technique was used to prepare an ultra-smooth surface of AISI 52100 steel. It was found that an unexpectedly high MRR of 500 nm/min and a satisfactory surface roughness Ra of 4.0 nm are achieved simultaneously by the synergistic effect of TiSol-NH4 dispersion and H2O2 at near neutral pH 6.0. During the polishing process, the organic base in TiSol-NH4 dispersion and H2O2 can be smoothly transported to the contact area along with uniformly dispersed titanium dioxide as nanocapsules, and then the chemicals for oxidation and complexation are provided to form a reaction film on the AISI 52100 steel surface, while abrasive nanoparticles provide sufficient mechanical force to abrade such a reaction film successively. With the addition of a small amount of H2O2, a porous composite layer composed of iron oxides and iron complex compounds with relatively low mechanical strength can be rapidly formed on the top surface. Therefore, the MRR first dramatically increases. When the H2O2 concentration crosses 0.1 wt% at the MRR summit and further increases, the layer gradually grows compact with high mechanical strength. Therefore, the MRR then gradually decreases. The findings can provide an efficient approach for processing bearing steels with excellent surface integrity.
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Bhadeshia, H.K.D.H.: Steels for bearings. Prog. Mater Sci. 57(2), 268–435 (2012)
Shiozawa, K., Lu, L.: Very high-cycle fatigue behaviour of shot-peened high-carbon–chromium bearing steel. Fatigue Fract. Eng. Mater. Struct. 25(8–9), 813–822 (2002)
Kao, M.J., Hsu, F.C., Peng, D.X.: Synthesis and characterization of SiO2 nanoparticles and their efficacy in chemical mechanical polishing steel substrate. Adv. Mater. Sci. Eng. 2014, 1–8 (2014)
Peng, D.-X.: Chemical mechanical polishing of steel substrate using aluminum nanoparticles abrasive slurry. Ind. Lubr. Tribol. 66(1), 124–130 (2014)
Jiang, L., He, Y., Luo, J.: Chemical mechanical polishing of steel substrate using colloidal silica-based slurries. Appl. Surf. Sci. 330, 487–495 (2015)
Bouacha, K., Yallese, M.A., Mabrouki, T., Rigal, J.-F.: Statistical analysis of surface roughness and cutting forces using response surface methodology in hard turning of AISI 52100 bearing steel with CBN tool. Int. J. Refract. Met. Hard Mater. 28(3), 349–361 (2010)
Fujishima, A., Rao, T.N., Tryk, D.A.: Titanium dioxide photocatalysis. J. Photochem. Photobiol. 1(1), 1–21 (2000)
Qiao, G., Ou, J.: Corrosion monitoring of reinforcing steel in cement mortar by EIS and ENA. Electrochim. Acta 52(28), 8008–8019 (2007)
Larabi, L., Harek, Y., Traisnel, M., Mansri, A.: Synergistic influence of poly(4-Vinylpyridine) and potassium iodide on inhibition of corrosion of mild steel in 1M HCl. J. Appl. Electrochem. 34(8), 833–839 (2004)
Shokry, H., Yuasa, M., Sekine, I., Issa, R.M., El-baradie, H.Y., Gomma, G.K.: Corrosion inhibition of mild steel by schiff base compounds in various aqueous solutions: part 1. Corros. Sci. 40(12), 2173–2186 (1998)
Wu, X.J., Zhang, Z.Z., Liang, Q.S., Meng, J.: Evolution from (110) Fe to (111) Fe3O4 thin films grown by magnetron sputtering using Fe2O3 target. J. Cryst. Growth 340(1), 74–77 (2012)
Scheffe, J.R., Francés, A., King, D.M., Liang, X., Branch, B.A., Cavanagh, A.S., George, S.M., Weimer, A.W.: Atomic layer deposition of iron(III) oxide on zirconia nanoparticles in a fluidized bed reactor using ferrocene and oxygen. Thin Solid Films 517(6), 1874–1879 (2009)
Stoch, J., Gablankowska-Kukucz, J.: The effect of carbonate contaminations on the XPS O 1s band structure in metal oxides. Surf. Interface Anal. 17(3), 165–167 (1991)
Calvo, E.J., Pallotta, C.D., Hild, S., Garcia, E.: XPS and electrochemical studies of chromium modified passive iron electrodes. J. Electrochem. Soc. 135(2), 314–320 (1988)
Kishi, K., Ikeda, S.: X-ray photoelectron spectroscopic study for the adsorption of acetic acid and ethylenediamine on iron and nickel. Appl. Surf. Sci. 5(1), 7–20 (1980)
Byon, H.R., Suntivich, J., Crumlin, E.J., Shao-Horn, Y.: Fe–N-modified multi-walled carbon nanotubes for oxygen reduction reaction in acid. PCCP 13(48), 21437–21445 (2011)
Xiao, H., Shao, Z.-G., Zhang, G., Gao, Y., Lu, W., Yi, B.: Fe–N–carbon black for the oxygen reduction reaction in sulfuric acid. Carbon 57, 443–451 (2013)
Terauchi, T., Kobayashi, Y., Iwai, H., Tanaka, A.: Protonic defect induced carrier doping in TTFCOO−NH4 +: tunable doping level by solvent. Synth. Met. 162(5), 531–535 (2012)
Sanjinés, R., Tang, H., Berger, H., Gozzo, F., Margaritondo, G., Lévy, F.: Electronic structure of anatase TiO2 oxide. J. Appl. Phys. 75(6), 2945–2951 (1994)
White, D., Parker, J.C., Nagarajan, R.: Mechanistic investigations of ruthenium polishing enabled by heterogeneous catalysis with titania-based slurries. In: Proceedings of the MRS Proceedings, pp. 1249-E1204–1204. Cambridge Univ Press (2010)
Cui, H., Park, J.-H., Park, J.-G.: Environmentally clean slurry using nano-TiO2-abrasive mixed with oxidizer H2O2 for ruthenium-film chemical mechanical planarization. Appl. Surf. Sci. 282, 844–850 (2013)
Choi, S., Doyle, F.M., Dornfeld, D.: A model of material removal and post process surface topography for copper CMP. Procedia Eng. 19, 73–80 (2011)
Yang, C., Zhang, H., Guo, W., Fu, Y.: Effects of H2O2 addition on corrosion behavior of high-strength low-alloy steel in seawater. J. Chin. Soc. Corros. Protect. 33(003), 205–210 (in Chinese) (2013)
Dong, J., Dong, J., Han, E., Liu, C., Ke, W.: Rusting evolvement of mild steel under wet/dry cyclic condition with pH 400 NaHSO3 solution. Corros. Sci. Protect. Technol. 21(1), 1–4 (in Chinese) (2009)
Hossain, M.A., Islam, M.S., Alam, M.A., Sultan, T.: Synthesis, physiochemical studies and antimicrobial screening of metal complexes of Fe(III) & Au(III) with amino acids. Int. J. Sci. Technol. Res. 2(7), 210–217 (2013)
Yang, X., Zheng, W.: Analysis on the corrosion rust of weathering steel and carbon steel exposed to atmosphere for two years. Corros. Protect. (in Chinese) 23(3), 97–98 (2002)
Dong, J., Ke, W.: The accelerated test of simulated atmospheric corrosion and the rust evolution of low carbon steel. Electrochemistry (in Chinese) 15(2), 170–178 (2009)
The authors are grateful for the financial support by the National Natural Science Foundation of China (51605396 and 51975488), National Key R&D Program of China (2018YFB2000400), Science Challenge Project (TZ2018006-0101-04), Tribology Science Fund of State Key Laboratory of Tribology (SKLTKF16A02), and Self-developed Project of State Key Laboratory of Traction Power (2017TPL_Z02).
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Wu, H., Jiang, L., Liu, J. et al. Efficient Chemical Mechanical Polishing of AISI 52100 Bearing Steel with TiSol-NH4 Dispersion-Based Slurries. Tribol Lett 68, 34 (2020). https://doi.org/10.1007/s11249-020-1274-4
- Chemical mechanical polishing
- Bearing steel
- Abrasive processing