Tribology Letters

, 44:167 | Cite as

A Tribological Study of SU-8 Micro-Dot Patterns Printed on Si Surface in a Flat-on-Flat Reciprocating Sliding Test

Original Paper


Tribological properties of optimized SU-8 micro-dot patterns on Silicon (Si) were evaluated using a flat-on-flat tribometer. Sliding tests on the patterns were conducted against a SU-8 spin-coated 2 × 2 mm2 Si substrate at varying normal loads at a fixed rotational speed. It was observed that the pitch of the SU-8 pattern on Si substrate had significant influence on the wear durability. Ultra-thin layer of perfluoropolyether was over-coated onto SU-8 micro-dot patterned specimens for enhanced wear durability, and the specimen of the optimized pitch 450 μm has shown a wear life of more than 100,000 cycles at a normal load of 650 mN.


Micropatterning Tribology SU-8 



The authors would like to acknowledge the financial support given to this study by the National Research Foundation (NRF), Singapore (Award No. NRF-CRP 2-2007-04).


  1. 1.
    Williams, J.A., Le, H.R.: Tribology and MEMS. J. Phys. D Appl. Phys. 39, 201–204 (2006)CrossRefGoogle Scholar
  2. 2.
    Van Spengen, W.M., Puers, R., De Wolf, I.: On the physics of stiction and its impact on the reliability of microstructures. J. Adhesion Sci. Technol. 17(4), 563–582 (2003)CrossRefGoogle Scholar
  3. 3.
    Tas, N., Sonnenberg, T., Jansen, H., Legtenberg, R., Elwenspoek, M.: Stiction in surface micromachining. J. Micromech. Microeng. 6, 385–397 (1996)CrossRefGoogle Scholar
  4. 4.
    Ashurst, W.R., Yau, C., Carraro, C., Maboudian, R., Dugger, M.T.: Dichlorodimethylsilane as an anti-stiction monolayer for MEMS: a comparison to the octadecyltrichlosilane self-assembled monolayer. J. Microelectromech. Syst. 10(1), 41–49 (2001)CrossRefGoogle Scholar
  5. 5.
    Baumgart, P., Krajnovich, D.J., Nguyen, T.A., Tam, A.C.: A new laser texturing technique for high performance magnetic disk drives. IEEE Trans. Magn. 31, 2946–2951 (1995)CrossRefGoogle Scholar
  6. 6.
    Gui, J., Marchon, B.: A stiction model for a head-disk interface of a rigid disk drive. J. Appl. Phys. 78(6), 4206 (1995)CrossRefGoogle Scholar
  7. 7.
    Tay, N.B., Minn, M., Sinha, S.K.: Polymer jet printing of SU-8 micro-dot patterns on Si surface: optimization of tribological properties. Tribolo. Lett. 42, 215–222 (2011)CrossRefGoogle Scholar
  8. 8.
    Li, X., Bhushan, B.: A review of nanoindentation continuous stiffness measurement technique and its applications. Mater. Charact. 48, 11–36 (2002)CrossRefGoogle Scholar
  9. 9.
    Hertz, H.: On the contact of elastic solids. J. Reine. angew. Math. 92, 156–171 (1882)CrossRefGoogle Scholar
  10. 10.
    Greenwood, J.A., Williamson, J.B.P.: The contact of nominally flat surfaces. Proc. Roy. Soc. A295, 300–319 (1966)Google Scholar
  11. 11.
    Al-Halhouli, A.T., Kampen, I., Krah, T., Büttgenbach, S.: Nanoindentation testing of SU-8 photoresist mechanical properties. Microelectron. Eng. 85, 942–944 (2008)CrossRefGoogle Scholar
  12. 12.
    Myshkin, N.K., Petrokovets, M.I., Kovalev, A.V.: Tribology of polymers: adhesion, friction, wear, and mass-transfer. Tribol. Int. 38, 910–921 (2005)CrossRefGoogle Scholar

Copyright information

© Springer Science+Business Media, LLC 2011

Authors and Affiliations

  1. 1.Department of Mechanical EngineeringNational University of SingaporeSingaporeSingapore

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