Tribology Letters

, Volume 21, Issue 1, pp 31–37

Tribological properties of bio-mimetic nano-patterned polymeric surfaces on silicon wafer

  • E.-S. Yoon
  • R.A. Singh
  • H. Kong
  • B. Kim
  • D.-H. Kim
  • H.E. Jeong
  • K.Y. Suh
Article

Abstract

Nano-patterns made of poly(methyl methacrylate) (PMMA) were fabricated on silicon wafer using a capillarity-directed soft lithographic technique. Patterns with three different aspect ratios were investigated for their adhesion and friction properties at nano-scale and for friction at micro-scale. The patterned samples exhibited superior tribological properties, at both these scales when compared to those of flat PMMA thin films.

Keywords

nano micro adhesion friction lithography tribology AFM 

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Copyright information

© Springer Science+Business Media, Inc. 2006

Authors and Affiliations

  • E.-S. Yoon
    • 1
  • R.A. Singh
    • 1
  • H. Kong
    • 1
  • B. Kim
    • 2
  • D.-H. Kim
    • 2
  • H.E. Jeong
    • 3
  • K.Y. Suh
    • 3
  1. 1.Tribology Research CenterKorea Institute of Science and TechnologySeoulKorea
  2. 2.Microsystem Research CenterKorea Institute of Science and TechnologySeoulKorea
  3. 3.School of Mechanical and Aerospace Engineering, Seoul National UniversitySeoulKorea

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