Russian Physics Journal

, Volume 54, Issue 11, pp 1218–1225 | Cite as

Effect of deposition parameters on the superhardness and stoichiometry of nanostructured Ti–Hf–Si–N films

  • A. D. Pogrebnyak
  • V. M. Beresnev
  • A. P. Shpak
  • P. Konarskii
  • F. F. Komarov
  • G. V. Kirik
  • N. A. Makhmudov
  • D. A. Kolesnikov
  • V. V. Uglov
  • O. V. Sobol
  • M. V. Kaverin
  • V. V. Grudnitskii
Article

Superhard nanostructured Ti–Hf–Si–N coatings (films) possessing high physical and mechanical properties have been produced. Nuclear and atomic physical analyses, such as RBS, SIMS, GDMS, SEM-EDXS, XRD, and nanoindentation were used to investigate the elemental and phase composition and the morphology of the films as functions of the pressure in the chamber and of the bias voltage applied to the substrate. It was observed that as the grain size in nc-(Ti, Hf)N coatings was decreased from 6.7 to 5 nm and α-Si3N4 (amorphous or quasi-amorphous phase interlayer between nanograins) formed, the coating nanohardness increased from 42.7 to 48.4 ± 1.6 GPa. However, the further decrease of the (Ti, Hf)N grain size to 4.0 nm resulted in a slight decrease in nanohardness. The stoichiometry of the films changes from (Ti40–Hf9–Si7.5)N46 to (Ti28–Hf18–Si9)N45, and also changed the lattice parameter of the (Ti, Hf)N solid solution. It should be noted that the high-hardness coatings showed the least friction coefficient (0.2), and its value remained unchanged until the coating worn out.

Keywords

superhard nanostructured two-phase coatings Ti–Hf–Si–N elastic modulus friction coefficient elemental composition stoichiometry 

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    A. D. Pogrebnyak, A. P. Shpak, N. A. Azarenkov, and V. M. Beresnev, Usp. Phys. Nauk, 179, 35–64 (2009).CrossRefGoogle Scholar
  2. 2.
    S. Veprek, M. G. L. Veprek-Hejiмan, P. Karvankova, and J. Prohazka, Thin Solid Films, 476, 1–29 (2005).ADSCrossRefGoogle Scholar
  3. 3.
    J. Musil, Hard Nanocomposite Coatings, Present Status and Trends, Research Singpost. Publ., UK (2007).Google Scholar
  4. 4.
    S. Veprek, A. S. Argon, and R. F. Zhang, Philosoph. Magaz. Lett., 87, 955–966 (2007).ADSCrossRefGoogle Scholar
  5. 5.
    A. D. Pogrebnyak, O. V. Sobol, and V. M. Beresnev, Tech. Phys. Lett., 35, 103–110 (2009).CrossRefGoogle Scholar
  6. 6.
    A. D. Pogrebnjak, M. M. Danilionok, and A. A. Drobyshevskaya, Vacuum, 83, 235–239 (2009).CrossRefGoogle Scholar
  7. 7.
    A. D. Pogrebnyak, M. M. Danilyonok, and A. A. Drobyshevskaya, Russ. Phys. J., No. 12, 1317–1324 (2009).Google Scholar
  8. 8.
    V. V. Uglov, V. M. Anischnik, S. V. Zlotskij, et al., Surf. Coat. Tech., 202, 2394–2398 (2008).CrossRefGoogle Scholar
  9. 9.
    A. D. Pogrebnjak, O. V. Sobol, V. M. Beresnev, et al., Nanostruct. Mater. Nanotechnol. IV: Cer. Eng. Sci. Proc., 31, 127–139 (2010).CrossRefGoogle Scholar
  10. 10.
    K. J. Smitles, Handbook of a Metals [in Russian], Metallurgiya, Moscow (1980).Google Scholar
  11. 11.
    A. D. Korotaev, V. D. Borisov, and V. Yu. Mashkov, Fiz. Mezomekh., 12, 79–91 (2009).Google Scholar
  12. 12.
    W. C. Oliver and G. M. Pharr, J. Matter. Res., 7, 1564–1583 (1992).Google Scholar

Copyright information

© Springer Science+Business Media, Inc. 2012

Authors and Affiliations

  • A. D. Pogrebnyak
    • 1
    • 2
  • V. M. Beresnev
    • 3
  • A. P. Shpak
    • 2
  • P. Konarskii
    • 4
  • F. F. Komarov
    • 5
  • G. V. Kirik
    • 6
  • N. A. Makhmudov
    • 7
  • D. A. Kolesnikov
    • 8
  • V. V. Uglov
    • 5
  • O. V. Sobol
    • 9
  • M. V. Kaverin
    • 1
  • V. V. Grudnitskii
    • 3
  1. 1.Sumy State University, Sumy Institute for Surface ModificationSumyUkraine
  2. 2.G. V. Kurdyumov Institute for Metal PhysicsNAS of UkraineKievUkraine
  3. 3.Kharkiv National UniversityKharkovUkraine
  4. 4.Tele and Radio Research InstituteWarsawPoland
  5. 5.Belarusian State UniversityMinskBelarus
  6. 6.Concern “Ukrrosmetall”SumyUkraine
  7. 7.Samarkand Branch of Tashkent University of Information TechnologySamarkandUzbekistan
  8. 8.Belgorod State UniversityBelgorodRussia
  9. 9.National Technical UniversityKharkovUkraine

Personalised recommendations