Plasma Chemistry and Plasma Processing

, Volume 39, Issue 1, pp 165–185 | Cite as

Quantitative Analysis of Ozone and Nitrogen Oxides Produced by a Low Power Miniaturized Surface Dielectric Barrier Discharge: Effect of Oxygen Content and Humidity Level

  • Ayman A. AbdelazizEmail author
  • Tatsuo Ishijima
  • Naoki Osawa
  • Takafumi Seto
Original Paper


This study presented a quantitative evaluation of the performance of a low power miniaturized SDBD source for the production of ozone and nitrogen oxides as benchmarks of long-lived RONS. The effects of varying oxygen and humidity on the trend of the production efficiency are investigated. The oxygen content and the humidity had no noticeable effect on the total power consumed, but their level in the feeding gas has a strong impact on the production of NxOy. It is found also that there is an optimum level of the oxygen content and the humidity for the production of NO2 and N2O. The analysis of the results indicated that the nitrogen excited species, especially \({\text{N}}_{2 } \left( {A^{3} \varSigma_{u}^{ + } } \right)\) and N(2D) play vital roles in the production of the nitrogen oxides, particularly the NO, which considered as the main source for the other NxOy in the present system. Interestingly, it is found that the humidity has a positive effect on the NO2 production, while it has a negative effect on the N2O and O3, which implied that the present SDBD is a strong oxidizer for the formed NO. The rise in the gas temperature in the present SDBD was negligible and has no effect on the production of nitrogen oxides, while the temperature of the plasma channel might affect the RONS production efficiency. Investigating the production mechanisms and the energy efficiency, of the formed nitrogen oxides, unravels for the first time the performance of the SDBD for nitrogen fixation.


Surface dielectric barrier discharge Ozone production Nitrogen oxides production Effect of oxygen content Effect of humidity Role of excited species 



This work was partially supported by the Chubu foundation fellowship program (2015). Dr. Ayman A. Abdelaziz thanks Chubu foundation for supporting his fellowship research at the Kanazawa University. Thanks are due to Mr. Takafumi Tsuji and Mr. Shingo Hayamizu for the assistance offered during the measurements of the nitrogen oxides by the FTIR.


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Copyright information

© Springer Science+Business Media, LLC, part of Springer Nature 2018

Authors and Affiliations

  • Ayman A. Abdelaziz
    • 1
    Email author
  • Tatsuo Ishijima
    • 2
  • Naoki Osawa
    • 3
  • Takafumi Seto
    • 4
  1. 1.Physics Department, Faculty of ScienceAssiut UniversityAssiutEgypt
  2. 2.Research Center for Sustainable Energy and TechnologyKanazawa UniversityKakuma-machi, KanazawaJapan
  3. 3.Department of Electrical and Electronic Engineering, Center for Electric, Optic and Energy ApplicationsKanazawa Institute of TechnologyNonoichiJapan
  4. 4.School of Natural SystemKanazawa UniversityKakuma-machi, KanazawaJapan

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