Nitrogen Atmospheric-Pressure-Plasma-Jet Induced Oxidation of SnOx Thin Films
- 302 Downloads
SnOx thin films that were rf-sputter-deposited under various gas flow ratios ([O2]/([O2] + [Ar]) OFR = 3.0, 3.6, 4.2 and 4.8 %) were rapidly annealed using atmospheric pressure plasma jets (APPJs) in temperature range of ~350–386 °C for up to 5 min. The original electron probe micro-analysis [O] contents in the as-deposited films were ~25, ~30, ~35 and ~40 % for films deposited at ([O2]/([O2] + [Ar]) gas flow ratios OFR = 3.0, 3.6, 4.2 and 4.8 %, respectively. APPJ annealing increased the [O] content to ~35 % for films deposited at OFR = 3.0 and 3.6 %, where the [O] content remained in similar levels for films deposited at OFR = 4.2 and 4.8 %. Crystalline metallic Sn was identified in films as-deposited at OFR = 3.0 and 3.6 %; on the other hand, an X-ray amorphous SnOx phase was identified in films as-deposited at OFR = 4.2 and 4.8 %. Crystallization and oxidation by APPJ annealing improved the transmittance and blue-shifted the absorption band edge to ~420 nm. All APPJ-annealed films exhibit n-type conductivity that may be contributed by the mixed phases of SnO, SnO2 and a small amount of Sn.
KeywordsAtmospheric pressure plasma jet Oxidation SnOx Sn SnO SnO2
The authors gratefully acknowledge funding support from the Ministry of Science and Technology of Taiwan [MOST 102-2221-E-002-060, MOST 103-2221-E-002-057, MOST 104-2221-E-002-103 (JZC) and MOST 100-2221-E-002-151-MY3 and MOST 101-2628-E-002-020-MY3 (ICC)]. The authors thank Mr. Chung-Yuan Kao and Ms. Yuan-Tze Lee of the Instrumentation Center of National Taiwan University for their assistances with EPMA and SEM operation.
- 4.Chiang MH, Liao KC, Lin IM, Lu CC, Huang HY, Kuo CL, Wu JS, Hsu CC, Chen SH (2010) Effects of oxygen addition and treating distance on surface cleaning of ITO glass by a non-equilibrium nitrogen atmospheric-pressure plasma jet. Plasma Chem Plasma Process 30(5):553–563. doi: 10.1007/s11090-010-9237-4 CrossRefGoogle Scholar
- 5.Lee EJ, Kwon JS, Om JY, Moon SK, Uhm SH, Choi EH, Kim KN (2014) The enhanced integrin-mediated cell attachment and osteogenic gene expression on atmospheric pressure plasma jet treated micro-structured titanium surfaces. Curr Appl Phys 14:S167–S171. doi: 10.1016/j.cap.2013.12.033 CrossRefGoogle Scholar