Plasma Chemistry and Plasma Processing

, Volume 34, Issue 4, pp 917–932

Surface Analysis of Titanium Cleaning and Activation Processes: Non-thermal Plasma Versus Other Techniques

  • Pieter Cools
  • Nathalie De Geyter
  • Els Vanderleyden
  • Peter Dubruel
  • Rino Morent
Original Paper

DOI: 10.1007/s11090-014-9552-2

Cite this article as:
Cools, P., De Geyter, N., Vanderleyden, E. et al. Plasma Chem Plasma Process (2014) 34: 917. doi:10.1007/s11090-014-9552-2

Abstract

A medium pressure (5 kPa) dielectric barrier discharge operating in different atmospheres (air and argon) is used to develop a fast and easy way to remove adsorbed carbon contamination. Chemical and physical changes at the sample surface after plasma treatment are studied, making use of contact angle measurements, X-ray photoelectron spectroscopy analysis and atomic force microscopy measurements. The obtained results are compared with other chemical and thermal treatments typically used. This comparison shows that plasma treatment at medium pressure is able to remove up to 20 % more of the adsorbed carbon compared to the classical cleaning methods, while at the same time being less aggressive, leaving the sub-surface chemistry unchanged. Moreover, the analysis techniques give a fundamental insight in the reactions processes at the titanium surface when exposed to a medium pressure plasma.

Keywords

AFM Dielectric barrier discharge Medium pressure plasma Titanium XPS 

Copyright information

© Springer Science+Business Media New York 2014

Authors and Affiliations

  • Pieter Cools
    • 1
  • Nathalie De Geyter
    • 1
  • Els Vanderleyden
    • 2
  • Peter Dubruel
    • 2
  • Rino Morent
    • 1
  1. 1.Research Unit Plasma Technology (RUPT), Department of Applied Physics, Faculty of EngineeringGhent UniversityGhentBelgium
  2. 2.Polymer Chemistry and Biomaterials Research Group (PBM), Department of Organic Chemistry, Faculty of SciencesGhent UniversityGhentBelgium

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