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Fast Fourier factorization for differential method and RCWA: a powerful tool for the modeling of non-lamellar metallic diffraction gratings

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Abstract

The rigorous coupled-wave analysis (RCWA), also known as Fourier modal method, is one of the most popular methods for the modeling of diffraction gratings. It has been proven to be particularly effective for lamellar gratings. However, for non-lamellar metallic gratings, in TM polarization, the differential method (DM) or the RCWA need to be associated with the fast Fourier factorization (FFF) to provide more accurate solutions. In this study, we present the effectiveness of the FFF when it is associated with the DM and the RCWA for different grating’s profiles, and we show how to circumvent on the case where the FFF can diverge when the metal permittivity is close to a pure negative real value.

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Acknowledgemets

This work was supported by the ODISSEA project funded by the French National Agency of Research ‘ANR’ under Grant No 16-CE39-0016-01.

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Correspondence to Habib Mohamad.

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This article is part of the Topical Collection on Optical Wave and Waveguide Theory and Numerical Modelling.

Guest edited by Alejandro Ortega Moñux, Rafael Godoy Rubio and Jiri Ctyroky.

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Mohamad, H., Essaidi, S., Blaize, S. et al. Fast Fourier factorization for differential method and RCWA: a powerful tool for the modeling of non-lamellar metallic diffraction gratings. Opt Quant Electron 52, 127 (2020). https://doi.org/10.1007/s11082-020-2240-y

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Keywords

  • Computational electromagnetic
  • 1D diffraction grating
  • RCWA
  • Differential method
  • Fast Fourier factorization