Springer Nature is making SARS-CoV-2 and COVID-19 research free. View research | View latest news | Sign up for updates

Robust design of Si/Si3N4 high contrast grating mirror for mid-infrared VCSEL application

  • 127 Accesses

  • 3 Citations


A Si/Si3N4 high contrast grating mirror has been designed for a VCSEL integration in mid-infrared (λ = 2.65 μm). The use of an optimization algorithm which maximizes a VCSEL mirror quality factor allowed the adjustment of the grating parameters while keeping large and shallow grating pattern. The robustness with respect to fabrication error has been enhanced thanks to a precise study of the grating dimension tolerances. The final mirror exhibits large high reflectivity bandwidth with a polarization selectivity and several percent of tolerance on the grating dimensions.

This is a preview of subscription content, log in to check access.


  1. Bachmann, A., Arafin, S., Kashani-Shirazi, K.: New J. Phys. 11(12), 125014 (2009). http://stacks.iop.org/1367-2630/11/i=12/a=125014

  2. Chevallier C., Fressengeas N., Genty F., Jacquet J.: Appl. Phys. A Mater. 103(4), 1139 (2011). doi:10.1007/s00339-010-6059-4

  3. Chevallier, C., Fressengeas, N., Genty, F., Jacquet, J.: Opt. Laser Technol. 44(3), 626 (2012). doi:10.1016/j.optlastec.2011.09.010. http://www.sciencedirect.com/science/article/pii/S0030399211002672

  4. Debernardi P., Ostermann J., Feneberg M., Jalics C., Michalzik R.: . IEEE J. Sel. Top. Quantum Electron. 11(1), 107 (2005). doi:10.1109/JSTQE.2004.841712

  5. Ducanchez A., Cerutti L., Grech P., Genty F., Tournié E.: Electron. Lett. 45(5), 265 (2009)

  6. Feoktistov, V.: Differential Evolution, Optimization and Its Applications, vol. 5 (Springer US, 2006). doi:10.1007/978-0-387-36896-2_1

  7. Huang M., Zhou Y., Chang-Hasnain C.: Nat. Photon. 1(2), 119 (2007). doi:10.1038/nphoton.2006.80

  8. Kroshko, D.L.: OpenOpt 0.27 (2009). http://openopt.org/

  9. Mateus C., Huang M., Deng Y., Neureuther A., Chang-Hasnain C.: IEEE Photon. Technol. Lett. 16(2), 518 (2004). doi:10.1109/LPT.2003.821258

  10. Moharam, M.G., Pommet, D.A., Grann, E.B., Gaylord, T.K.: J. Opt. Soc. Am. A 12(5), 1077 (1995). http://josaa.osa.org/abstract.cfm?URI=josaa-12-5-1077

  11. Rathgen, H.: mrcwa 20080820 (2010). http://mrcwa.sourceforge.net/

  12. Soref, R.A., Emelett, S.J., Buchwald, W.R.: J. Opt. A: Pure Appl. Opt. 8(10), 840 (2006). http://stacks.iop.org/1464-4258/8/i=10/a=004

  13. Zhou Y., Huang M., Chang-Hasnain C.: IEEE Photon. Technol. Lett. 20(6), 434 (2008). doi:10.1109/LPT.2008.916969

Download references

Author information

Correspondence to C. Chevallier.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Chevallier, C., Fressengeas, N., Genty, F. et al. Robust design of Si/Si3N4 high contrast grating mirror for mid-infrared VCSEL application. Opt Quant Electron 44, 169–174 (2012). https://doi.org/10.1007/s11082-012-9578-8

Download citation


  • High contrast grating mirror
  • Mid-infrared VCSEL
  • Robust design