Frequency domain analysis of modes in a photonic crystal micro-opto-electro-mechanical system with periodically arranged circular holes
In the present work we investigate the electromagnetic properties of a photonic crystal micro-opto-electro-mechanical system. It consists of vertically arranged semiconductor membranes with air gaps forming a Fabry–Pérot cavity with distributed Bragg reflectors on each side. In the top membrane, circular holes are etched introducing a photonic crystal. We investigate the optical transmission behavior of this system by detailed simulation. It includes an analysis of the three-dimensional eigenmodes and calculation of the transmittivity from the source problem. We find that in addition to the vertical Fabry–Pérot cavity modes additional modes exist. The origin of these modes can be traced to resonances occurring in the top photonic crystal membrane. It is shown that the photonic crystal modes have a strong impact on the transmittivity of the filter system.
KeywordsPhotonic crystal micro-opto-electro-mechanical system Photonic crystal membrane Fabry–Pérot cavity Modes
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