Fabrication and characterization of 1.55 μm single transverse mode large diameter electrically pumped VECSEL
We report on the design, fabrication, and characterization of InP-based 1.55 μm wavelength large diameter (50 μm) electrically pumped vertical external cavity surface emitting lasers (EP-VECSELs). The hybrid device consists of a half vertical cavity surface emitting laser (1/2-VCSEL) structure assembled with a concave dielectric external mirror. The 1/2-VCSEL is monolithically grown on InP substrate and includes a semiconductor Bragg mirror and a tunnel junction for electrical injection. Buried (BTJ) and ion implanted (ITJ) tunnel junction electrical confinement schemes are compared in terms of their thermal and electrical characteristics. Lower thermal resistance values are measured for BJT, but reduced current crowding effects and uniform current injection are evidenced for ITJ. Using the ITJ technique, we demonstrate Room-Temperature (RT) continuous-wave (CW) single transverse mode laser operation from 50-μm diameter EP-VECSEL devices. We show that the experimental laser optical output versus injected current (L–I) curves are well-reproduced by a simple analytical thermal model, consistent with the thermal resistance measurements performed on the 1/2-VCSEL structure. Our results indicate that thermal heating is the main mechanism limiting the maximum CW output power of 50-μm diameter VECSELs, rather than current injection inhomogeneity.
Keywords1.55 μm laser emission External cavity laser Semiconductor Bragg reflector Tunnel junction Vertical cavity surface emitting semiconductor laser
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- Bouchoule, S., Leclercq, J.-L., Regrény, P., Sagnes, I., Jacquet, J., Strassner, M., Plais, A., Poingt, F.: In-P Based wavelength tunable monolithic VCSEL structure with InP/air-gap top mirror compatible with a single epitaxy step. SPIE Photonics Europe Conference, Strasbourg, France, 26–30 April, Conf. Proceed. Paper 5453-24 (2004)Google Scholar
- Lu B., Zhou P., Cheng J. and Malloy K.J. (1994). High temperature pulsed and continuous-wave operation and thermally stable threshold characteristics of vertical-cavity surface-emitting lasers grown by metalorganic chemical vapor deposition. Appl. Phys., Lett. 65: 1337–1339 CrossRefADSGoogle Scholar
- Strzelecka E.M., Inerney J.G., Mooradian A., Lewis A., Shchegrov A.V., Lee D., Watson J.P., Kennedy K., Carey G.P., Zhou H., Ha W., Cantos B.D., Hitchens W.R., Heald D.L., Doan V.V. and Lear K.L. (2003). High power, high brightness 980 nm lasers based on the extended cavity surface emitting lasers concept. Proc. of SPIE 4993: 57–67 CrossRefADSGoogle Scholar