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Journal of Nanoparticle Research

, 15:1915 | Cite as

Wafer-scale fabrication of uniform Si nanowire arrays using the Si wafer with UV/Ozone pretreatment

  • Fan Bai
  • Meicheng LiEmail author
  • Rui Huang
  • Yue Yu
  • Tiansheng Gu
  • Zhao Chen
  • Huiyang Fan
  • Bing Jiang
Research Paper

Abstract

The electroless etching technique combined with the process of UV/Ozone pretreatment is presented for wafer-scale fabrication of the silicon nanowire (SiNW) arrays. The high-level uniformity of the SiNW arrays is estimated by the value below 0.2 of the relative standard deviation of the reflection spectra on the 4-in. wafer. Influence of the UV/Ozone pretreatment on the formation of SiNW arrays is investigated. It is seen that a very thin SiO2 produced by the UV/Ozone pretreatment improves the uniform nucleation of Ag nanoparticles (NPs) on the Si surface because of the effective surface passivation. Meanwhile, the SiO2 located among the adjacent Ag NPs can obstruct the assimilation growth of Ag NPs, facilitating the deposition of the uniform and dense Ag NPs catalysts, which induces the formation of the SiNW arrays with good uniformity and high filling ratio. Furthermore, the remarkable antireflective and hydrophobic properties are observed for the SiNW arrays which display great potential in self-cleaning antireflection applications.

Keywords

Silicon nanowire arrays UV/Ozone Wafer-scale Uniformity Self-cleaning 

Notes

Acknowledgments

This study is supported by the National Natural Science Foundation of China (51172069, 50972032, 61204064, and 51202067), and the Ph.D. Programs Foundation of the Ministry of Education of China (20110036110006), and the Fundamental Research Funds for the Central Universities (Key project 11ZG02).

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Copyright information

© Springer Science+Business Media Dordrecht 2013

Authors and Affiliations

  • Fan Bai
    • 1
    • 2
  • Meicheng Li
    • 1
    • 2
    • 3
    Email author
  • Rui Huang
    • 2
  • Yue Yu
    • 2
  • Tiansheng Gu
    • 2
  • Zhao Chen
    • 2
  • Huiyang Fan
    • 2
  • Bing Jiang
    • 2
  1. 1.School of Materials Science and EngineeringHarbin Institute of TechnologyHarbinChina
  2. 2.State Key Laboratory of Alternate Electrical Power System with Renewable Energy Sources, School of Renewable EnergyNorth China Electric Power UniversityBeijingChina
  3. 3.Suzhou InstituteNorth China Electric Power UniversitySuzhouChina

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