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Measuring of the Thickness of Thin Films with the Use of Harmonic Antisymmetric Lamb Waves

  • Kh. B. Tolipov
ACOUSTIC MEASUREMENTS

We propose a method for measuring the micrometer-range thicknesses of thin films with the use of acoustic waves. The method is based on the use of the nonlinear dependence of antisymmetric harmonic Lamb waves on the thickness of the tested material. The errors of measurements of the thickness of thin films are analyzed with the help of a contactless electromagnetoacoustic transducer of acoustic waves.

Keywords

acoustic field thin films electromagnetoacoustic receiver of elastic waves piezoelectric transducer 

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Copyright information

© Springer Science+Business Media, LLC, part of Springer Nature 2018

Authors and Affiliations

  1. 1.South-Ural State University (National Research University)ChelyabinskRussia

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